IZO透明金屬薄膜之研製及其在GaN基LEDs
之應用研究

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IZO透明金屬薄膜之研製及其在GaN基LEDs 之應用研究

The study of sputtering-deposited Indium-Zinc Oxide films and its application on GaN-based LEDs

陳學龍 , Masters　　Advisor：王水進　　

英文

穿透率；霍爾量測；原子力顯微鏡；銦鋅氧化物；光輸出功率； Hall measurment ； AFM ； Light output pwer(LOP) ； Indium-Zinc-Oxide(IZO) ； Transparency

Abstract │ Reference (24) │ Times Cited (11) │ Altmetrics

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In this thesis Indium-Zinc-Oxide (IZO) layers prepared by RF sputtering were investigated. By suitable adjusting the deposition condition, the IZO films have an optimum resistivity of 3.69�e10-4 �-cm and an average transparency of 80% in visible light range (400-800nm). Based on Hall measurement it indicates that the obtained IZO film is essentially n-type and with a high carrier concentration. After thermal annealing in N2 or O2 ambient for 5-15 min, according to AFM measurement, both resistivity and surface roughness were seen increasing substantially, especially in O2 ambient. In addition, an obvious shift in the peak of transmittance was observed.
Experimental current-voltage characteristics show that IZO/p-GaN is a Schottky contact even after thermal annealing at elevated temperature in either N2 or O2 ambient. To improve the contact property, a thin Au(45Å)/Ni(25Å) or Ni(50Å) layer is then employed in this work to serve as a cladding layer between IZO and p-GaN. Experimental results revealed that the IZO(3000Å)/oxidized-Au(45Å)/Ni(25Å)/p-GaN contact system has a specific contact resistivity (SCR) of 4.85×10-2 Ω-cm and a transparency of 73-75% in the wavelength of 465-475 nm. As compared to the case without the IZO layer, at a forward current of 20 mA, about 30% improvement in light output power (LOP) of GaN-based LEDs has been obtained.

Reference ( 24 ) 〈TOP〉

1 K. L. Chopra, S. Major, and D.K. Pandya, Thin Solid Films, vol 102, pp. 1 (1983)
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6 Von H, Kasper Z. Anorg Allg Chemie, vol 349, pp.113 (1967).
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7 T. Minami, T. Kakumu, S. Tanaka, J. Vac. Sci. Technol. A, vol 14, pp.1704 (1996).
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9 Tadatsugu Minami, J. Vac. Sci. Technol. A, vol 17, pp.1765 (1999).
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15 Martinez, M A. Herrero, and J. Gutierrez, M T , Solar Energy Materials & Solar Cells., v 45 n1 Jan 1, pp75-86 (1997).
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Times Cited (11) 〈TOP〉

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