在不同氧化條件下以真空蒸鍍熱氧化法製備奈米線氧化鎵薄膜及其氣體感測特性之研究

陳烐培

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在不同氧化條件下以真空蒸鍍熱氧化法製備奈米線氧化鎵薄膜及其氣體感測特性之研究

Morphology and Electrical Properties of Gas Sensitive Ga2O3 Nanowires Film Prepared Under Different Oxidation Atmosphere by Rtheotaxial Growth and Thermal Oxidation

陳烐培 , Masters　　Advisor：陳進成　　

繁體中文

薄膜；奈米線；氧化鎵；氣體感測器；熱氧化法；真空蒸鍍； gallium oxide ； gas sensor ； vacuum evaporation ； thin film ； rtheotaxial growth and thermal oxidation（RGTO）； nanowires

Abstract │ Reference (94) │ Times Cited (6) │ Altmetrics

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In recent years thin film semiconductor is extensively used as gas sensor to detect poison gas. And Ga2O3 possesses an N-type semiconductor characteristic, is stable at high temperature and being most often applied in detecting reducing gas. In the current study, Ga2O3 semiconductor thin film was prepared by rtheotaxial growth and thermal oxidation (RGTO) method on SiO2. The morphology and the electrical properties of Ga2O3 films were measured as functions of the thickness of Ga deposited on SiO2 and oxidation time. Their effects on the growth of nanowires of the Ga2O3 were examined.

The experimental results show that Ga2O3 grain size decreases as the oxidation time increases at high temperature, and the film morphology became uniform. When the oxidation time increases, the semiconductor characteristic of the Ga2O3 changes from N-type to P-type.

The sensitivity of the Ga2O3 films in response to ethanol were found to have an optimum sensing temperature at 575℃. Long nanowires are produced, however highest density of nanowires is observed if the oxidation is carried out under the ethanol vapor flow. When the thickness of Ga2O3 is below 0.3μm, no nanowires will be produced, and the same result was observed in this study.

Theoretically, an increase of concentration of reactant vapor must lead to more shifting of the resistance, and the identical experiment result agree with the theoretical prediction.

Reference ( 94 ) 〈TOP〉

3. C. D. Chriswell and J. J. Richard, “Use of electrolytically generated hydrogen as a purge gas for the isolation of volatile organic compounds from groundwater”, Separation Science and Technology, Vol. 28, No. 15-16, pp. 2377-2386 (Nov. 1993).
連結：
4. U. R. Bernier and R. A. Yost, “Vacuum operation of the flameioniza-tion detector for gas chromatography”, Journal of Chromatographic Science, Vol. 31, No. 9, pp. 358-362 (Sep. 1993).
連結：
5. G. Morel, “Method development and quality assurance for the analysis of hydrocarbons in environmental samples”, International Journal of Environmental Analytical Chemistry, Vol. 63, No. 4, pp. 269-288 (1996).
連結：
6. G. Heiland, “Homogeneous semiconducting gas sensors”, Sensors and Actuators, Vol. 2, pp. 343-361 (1982).
連結：
7. N. Yamazoe, Y. Kurokawa and T. Seiyama, “Effects of additives on semiconductor gas sensors”, Sensors and Actuators, Vol. 4, pp. 283-289 (1983).
連結：

Times Cited (6) 〈TOP〉

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