低摩擦氣壓伺服平台設計與控制之研究

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低摩擦氣壓伺服平台設計與控制之研究

A study on design and control of a low-friction pneumatic serove table

莊潤郁 , Masters　　Advisor：施明璋　　

繁體中文

死區補償；低摩擦平台； dead-zone compensator ； fuzzy controller

Abstract │ Reference (25) │ Altmetrics

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The nonlinear friction effects the positioning accuracy very much, so the study of nonlinear friction is very important. It is hard to reach the precise position controlling because of the friction of sticking-slipping effect on the usual pneumatic servo table. In order to overcome the sticking-slipping effect of the pneumatic table to enhance positioning accuracy, we design a pneumatic table with diaphragm to decrease the friction of the system . First, we set up a table with friction surveying instruments and then plot the relation curves between friction and velocity by experimental results. The hybrid fuzzy controller with the fuzzy tuning dead-zone compensator are proposed in this paper. From the experimental results, in case of different position, the positioning accuracy can reach within the 0.08μm without load and under 40 newton loading . Using load compensation, the steady state error can reach within 0.08um which is under the 40 newton axial loading. Eventually, according to positioning control result design a velocity feedback compensation, which can make system reduce oscillation and rise the positioning accuracy.

Reference ( 25 ) 〈TOP〉

[1] H.E. Merritt, “Hydraulic Control System” ,John Willey & Sons Inc., 1967
連結：
[7] 何啟吉, “氣壓缸與步進馬達作雙軸運動之位置控制研究”,國立成功大學機械工程研究所碩士論文,2002
連結：
[8] Fujita T, Tokashiki R, Kagawa T. “Stick-slip motion in pneumatic cylinders driven by meter-out circuit”. Proc. of the 4th JHPS International Symposium on Fluid Power, p131-136, 1999.
連結：
[9] Kazama T, Fujiwara M. “Experiment on frictional characteristics of pneumatic cylinders”, Proc. of the 4th JHPS International Symposium on Fluid Power, p453-458, 1999.
連結：
[10] K. R. Pai, M. C. Shih,”Nanoaccuracy Position Control of A Pneumatic Cylinder Driven Table”, International Journal of JSME, Series C,Vol.46,.No.3, p.1062-1068, 2003.
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