多層電極陣列式介電泳晶片應用於微粒子操控

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多層電極陣列式介電泳晶片應用於微粒子操控

Multiple Electrodes Arrayed Dielectrophoretic Chip with Application on Micro-Bead Manipulation

張輔廷 , Masters　　Advisor：李永春　　

繁體中文

三維微結構；微粒子；介電泳； Micro-Bead ； 3D Microstructure ； Dielectrophoresis

Abstract │ Reference (24) │ Altmetrics

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This study investigates new types of dielectrophoretic (DEP) chips which consist of arrayed electrodes and 3D microstructures. The goal is to optimize the sorting, trapping, and manipulating ability of beads. The underlying operational principle is based on negative-dielectrophoresis force.As different from conventional ones using only planar electrodes, these new DEP chips consist of ITO top and bottom electrodes, an arrayed Au middle electrode, and an arrayed SU-8 3D microstructure. In order to achieve single-bead manipulation, the size of the SU-8 3D microstructure array matches the size of the beads. It is shown that such a 3D structure not only
yields a non-uniform electric field for DEP trapping but also enhances the capability of positioning and immobilization of the trapped beads.
In theoretical analysis and simulation, Comsol Multiphysics is applied to simulate the DEP forces in these chips. In experiments, the results show the chips can successfully trap or manipulate beads by applying different electrical voltage signals with phase angles on the triple layer electrodes. In order to realize the optimum frequency to operate DEP force, we also investigate the electrical conductivity at different particle sizes.
In summary, we fabricate new DEP chips with improving capability of sorting, trapping, and manipulating beads. The design, analysis, and fabrication processes are all discussed in details.

Reference ( 24 ) 〈TOP〉

1. H. A. Pohl, “The motion and Precipitation of Suspensoids in Divergent Electric Fields”, Journal of Applied Physics, Vol. 22, 1951.
連結：
2. H. A. Pohl, “Some Effects of Nonuniform Fields on Dielectrics”, Journal of Applied Physics, Vol. 29, pp. 1182-1188, 1958.
連結：
3. J. Voldman, R. A. Braff, M. Toner, M. L. Gray and M. A. Schmidt, “Holding Forces of Single-Particle Dielectrophoretic Traps”, Biophysical Journal, Vol. 80, pp. 531-541, 2001.
連結：
4. A. Rosenthal and J. Voldman, “Dielectrophoretic Taps for Single-Particle Patterning”, Biophysical Journal, Vol. 88, pp. 2193-2205, 2005.
連結：
6. M. Frenea, S. P. Faure, B. L. Pioufle, P. Coquet and H. Fujita, “Positioning Living Cells on a High-density Electrode Array by Negative Dielectrophoresis”, Materials Science and Engineering C, Vol. 23, pp.597-603, 2003.
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