快速氧化鋅薄膜製程於焦電元件之應用

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快速氧化鋅薄膜製程於焦電元件之應用

A Rapid Process of ZnO Films Applied on Pyroelectric Devices

余士源 , Masters　　Advisor：蕭俊卿　　

繁體中文

氧化鋅；氣膠沉積法；電極；焦電效應；三維薄膜結構；雷射退火； Zinc oxide ； Aerosol deposition ； Electrode ； Pyroelectricity ； Three-dimensional film ； Laser annealing

Abstract │ Reference (68) │ Altmetrics

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Parallel Abstract 〈TOP〉

Increasing temperature variation rate in pyroelectric films is a useful method for enhancing the responsivity of pyroelectric devices. In the present study, an aerosol deposition (AD) rapid process for three-dimensional ZnO films deposited on substrates of silicnon nitride/silicon and polimide was applied on pyroelectric devices by laser annealing and shadow mask. The results indicated that a porous ZnO film was successfully produced by AD with annealing. The deeper cavities in films could enhance the temperature variation rate about 20.7% by finite element method. Three-dimensional ZnO films with the porous structure induced lateral temperature gradients on the sidewalls of the responsive element for increasing the temperature variation rate, and large surface area for improving the heat absorption. The responsivity of pyroelectric devices with three-dimensional ZnO films was higher than that with a single ZnO layer about 33.0%. Moreover, the responsivity of pyroelectric devices with ZnO films treated by laser annealing was similar to that by furnace annealing. The furnace annealing was twelve times the duration of laser annealing. Hence, AD with laser annealing can speedily deposit ZnO films with high quality, and then fabricate ZnO pyroelectric devices with high responsivity.

Reference ( 68 ) 〈TOP〉

[1]Razeghi, M., 1998, “Current status and future trends of infrared detectors”, Opto-Electronics Review, 6(3), 155-194.
連結：
[2]Rogalski, A., 2002, “Infrared detectors: an overview”, Infrared Physics & Technology, 43(3), pp.187-210.
連結：
[3]Wilson, J., and Hawkes, J. F. B., 1983, Optoelectronics: An Introduction, Prentice-Hall International.
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[5]Mark R Stoker, 2005, ”Measuring temperature”, Anaesthesia & Intensive Care Medicine , 6(6), 194-198.
連結：
[7]Müller, M., Budde, W., Gottfried, A., Huebel, R., Jähne, R., and Kück, H., 1996, “A Thermoelectric Infrared Radiation Sensor with Monolithically Integrated Amplifier Stage and Temperature Sensor”, Sensors and Actuators A: Physical, 54(19), 601-605.
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