脈衝電化學加工之微電極製作參數分析

The Analysis and Investigation on the Micro-electrode Fabrication by Pulses Electrochemical Machining

王正育(Cheng-Yu Wang)

指導教授 ： 洪勵吾

國立中央大學/工學院/機械工程學系/碩士(2008年)

摘要

在發展微機電系統過程中，製作微結構產品的加工方法是重要且必須的，其中微電化學加工具有可加工任何金屬材料，工件表面無殘留應力，工具電極不損耗等優勢。在微電化學加工中，需要更微細工具電極，方可製造微結構元件，故本文將以製作圓柱狀的微電極為目標。
　　本文利用單一因子法分析加工參數(如：操作電壓、電解液濃度、脈衝頻率、加工能率、電解液溫度、電極旋轉速度)，再以單一因子法分析的結果；作為第二部份線性變化(如：操作電壓、加工能率)的實驗依據。
　　最後本文利用510 μm的鎢棒，以線性遞減操作電壓和加工能率的方式，成功的製作出刃長為2㎜、3㎜、4㎜，電極直徑為100 μm的圓柱狀微電極。

關鍵字

微電化學加工 ； 鎢棒 ； 脈衝電壓 ； 微電極

並列摘要

The development of MEMS (Micro Electro-Mechanical System), it is important and necessary to manufacture the micro-structure. In numerous of micro machining, the electrochemical micro machining has advantage that can machining any metal material, the work piece after machining will not have any residual stress remained on its surface, the tool electrode would not break. In the electrochemical micro machining, it needs the smaller electrode to manufacture the micro electrode. On the basis of advantage of electrochemical machining, we applied in the form of pulsed electrochemical polishing to fabricate the cylindrical microelectrode. We discussed the working parameters (ex. applied voltage, electrolyte concentration, frequency, duty, temperature, rotation) on fabricating microelectrode, and then it could fabricate the 100 μm cylindrical tungsten microelectrode by linear decay of applied voltage or duty at different length.

並列關鍵字

Tungsten rod ； Micro electrode ； pulsed voltage ； Electrochemical micromachining

參考文獻

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