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  • 學位論文

薄膜生物處理器淨化經初級處理之太陽能板切晶與化學機械研磨製程廢水

Purification of Effluent from Primary Treatment for Solar-Cell Wire-Saw and Chemical Mechanical Polishing Processes with Membrane Bioreactor

指導教授 : 黃益助

摘要


太陽能板電池上游製程會有各類酸鹼廢液如檸檬酸、氫氟酸、硝酸、硫酸、磷酸、鹽酸及氨等酸鹼廢水或氟系廢水產出,其化學需氧量(Chemical Oxygen Demand, COD)及生化需氧量(Biological Oxygen Demand, BOD)排放大多超出科學園區納管標準。傳統大多以化學混凝程序來進行處理,但處理後之COD及BOD仍偏高,常需要使用大量回收水或冷凝水來做放流水調勻以符合放流納管標準。 本研究以實際太陽能板切晶製程廢水,在原有化學混凝沉澱後再導入薄膜生物處理程序(Membrane Bioreactor, MBR),藉由監測MBR模組進/出流水之pH、懸浮固體物(SS)、BOD、COD來評估系統之處理效能。MBR模組經過四個月連續操作測試,在馴養期後處理能力相當穩定,BOD去除率可達90.3% ~ 98.5%;COD去除率也高達93.3% ~ 98.4%,科學園區放流水納管標準為BOD小於300mg/L,COD小於450mg/L,處理後水質符合其要求。模組試驗成功後再經過六個月現場MBR系統施作及試俥運轉測試,BOD去除率可達90.0%,而COD去除率也高達88.5%,實廠操作放流水水質亦符合科學園區納管標準。 未來的發展可以在MBR系統後增加逆滲透(RO)模組或樹脂,使其水質達到回收的標準,一方面可減少廢水的產生,另一方面也可增加回收率,減少工業用水的需求量。

並列摘要


Upstream wastes from the manufacturing process of solar panel cells and chemical mechanical polishing contains various types of pollutants, such as citric acid, hydrofluoric acid, nitric acid, sulfuric acid, phosphoric acid, hydrochloric acid and ammonia as well as alkali or fluorine compounds. The discharge of chemical oxygen demand (COD) and biological oxygen demand (BOD) are far higher than the influent standards of sewage of the science park. The wastewater is conventionally treated with chemical coagulation process, but the COD and BOD still remain high after treatment. It is often necessary to employ massive amounts of recycled or condensed water to evenly mix with the effluent in order to meet the sewage influent standards. In this study, a membrane bioreactor (MBR) treatment unit was introduced after the existed chemical coagulation and sedimentation processes for wastewater from an actual wafer slicing process used in solar panel manufacturing. The treatment performance of the MBR module was evaluated by monitoring the pH, suspended solids (SS), BOD, and COD of its influent and effluent. After 4 months of continuous operation and testing, the treatment performance post-domestication period was fairly stable, with a BOD removal rate of up to 90.3% ~ 98.5% and COD removal rate of up to 93.3% -98.4%. The sewage influent standards of science parks are less than 300 mg/L BOD and less than 450 mg/L COD. The treated effluent met these requirements. Following this successful module test, a 6 month on-site MBR system facilitation was performed, including commissioning and operation testing. The BOD removal rate reached 90.0%, while the COD removal rate was up to 88.5%. The water quality of the effluent from this actual plant operation also complied with science park influent sewage standards. Future development may focus on enhancement of the reverse osmosis (RO) module or resin after the MBR system in order to achieve the water quality standards sufficient for recycling. This will reduce wastewater production and increase water recovery, reducing the water demand of industry.

參考文獻


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