本論文探討薄膜電晶體液晶顯示器(Thin Film Transistor Liquid Crystal Display, TFT-LCD)產業五代廠實廠所設置之兩套蜂巢式沸石轉輪“旋轉式蓄熱式燃燒爐(RRTO)”處理設備,評估其吸附濃縮焚化系統揮發性有機物(Volatile Organic Compounds, VOCs)之效能。旋轉蓄熱式燃燒爐(Rotary Regenerative Thermal Oxidizer)之爐溫設定850℃,蜂巢式沸石轉輪轉速設定2.5轉/小時,系統風量1,375 m3/min,脫附風量91 m3/min,脫附溫度205℃,轉輪濃縮比為1:15。VOCs以霍式紅外光譜儀(Fourier Transform Infrared spectrometry, FTIR)及氣體層析-火焰離子偵測器(GC-FID)加以分析,檢測項目有丙二醇單甲基醚酯(PGMEA),丙二醇單甲基醚(PGME),乙酸丁酯 (nBA)與異丙醇(IPA)。丙二醇單甲基醚酯(PGMEA),丙二醇單甲基醚(PGME),乙酸丁酯 (nBA)與異丙醇(IPA)分析結果,其濃度可由3.3,118,75.4與431 mg/Nm3降為ND,1.85,1.15與4.16 mg/Nm3,其去除率分別可達100,98.43,98.47與99.03%,顯示旋轉式蓄熱式燃燒爐其可有效增進揮發性有機物之去除。
This paper aims at investigating the removal efficiency of volatile organic compounds (VOCs) produced from Thin Film Transistor Liquid Crystal Display (TFT-LCD) by using Rotary Regenerative Thermal Oxidizer (RRTO). Temperature in the furnace of RRTO was maintained at 850℃. Rotary speed of RRTO was operated in 2.5 revolution/hr. Inlet gas was 1,3753 m3/min and adsorption gas was 91 m3/min. Rotary concentrated ratio was 1/15. Adsorption temperature was set at 205℃. VOCs such as PGMEA, PGME, nBA and IPA were analyzed with FTIR and GC-FID. PGMEA, PGME, nBA and IPA were reduced from 3.3, 118, 75.4 and 431 mg/Nm3 to ND, 1.85, 1.15 and 4.16 mg/Nm3 respectively. Removal efficiency of PGMEA, PGME, nBA and IPA were found to be 100, 98.43, 98.47 and 99.03% respectively. Results implied that RRTO could improve the removal of VOCs efficiently.
為了持續優化網站功能與使用者體驗,本網站將Cookies分析技術用於網站營運、分析和個人化服務之目的。
若您繼續瀏覽本網站,即表示您同意本網站使用Cookies。