電阻式氧化銦錫感測元件與感測電路之研究

Study of Resistance-Type Indium-Tin-Oxide(ITO) Hydrogen Sensing Devices and Related Sensing Circuits

廖冠弘(Guan-Hung Liao)

指導教授 ： 林坤緯

朝陽科技大學/資訊學院/資訊工程系/碩士(2014年)

摘要

本研究已經成功製作出電阻式氧化銦錫氫氣感測元件以及結合arduino電路製作出氫氣感測系統。在半導體氫氣感測器方面，我們探討基於ITO覆蓋金粒子層的氫氣感測器有無溫濕度處理分別在不同操作溫度及氫氣濃度環境的氫氣感測特性。由SEM及AFM圖表面分析可以得知具有ITO覆蓋在金粒子層上比無金粒子層有較大的表面粗糙度，製作元件經過溫濕度處理後表面將出現類似奈米柱的形態。由實驗結果得知，製作元件經過溫濕度處理後在較低氫氣濃度（100ppm H2/air）以及較低操作溫度(150℃)有較高的感測靈敏度，無溫濕度處理元件則在較高氫氣濃度以及較高操作溫度有較佳的感測靈敏度，歸咎其原因可能是經過溫濕度處理後，體積與表面積雖然增加了，但也相對的增加電阻值，因此在低溫的氫氣濃度時，即可感測到較低的氫氣濃度，但是在較高操作溫度以及較高氫氣濃度時，感測電流差值大但是感測倍率受到限制．
　　我們亦開發一個基於Arduino開發版的簡易氫氣偵測系統。本氫氣偵測系統結合LCD顯示及LED燈號讓使用者更方便查看空氣中存在氫氣的濃度是否超過設定之標準值。

關鍵字

氫氣感測器 ； 氧化銦錫 ； 奈米柱 ； Arduino

並列摘要

We have successfully fabricated an indium tin oxide (ITO)-based resistive sensing device and a hydrogen sensing circuit based on Arduino system. In terms of hydrogen sensors based on semiconductor oxide, ITO-based hydrogen sensor underlying Au-nanodot layer with or without temperature-humidity treatment at differential work temperature and upon differential hydrogen concentration were fabricated and studied.
The ITO based hydrogen sensor with temperature treatment has a rougher surface morphology as compared with the ITO based without temperature-humidity treatment one. After the temperature-humidity treatment, the nanorod-like surface morphology will appear. The experimental results indicate that the studied hydrogen sensor with temperature-humidity treatment exhibits higher hydrogen sensitivity at low work temperature regime (<150℃) and higher hydrogen detecting capability at lower hydrogen concentration regime (<100ppm H2/air). This is mainly attributed to the larger specific surface area from the rougher surface. On the other hand, the studied device without temperature-humidity exhibits higher sensitivity at higher temperature and higher hydrogen concentration. This can be attributed that the studied device B has a small resistance; therefore, the resistance allows a greater amount of variation under introducing hydrogen gas.
In this study, we also developed a simple hydrogen detecting system based on Arduino developer edition. The hydrogen detection system combined with LCD display and LED to make it easier for users to see if the presence of hydrogen concentration in air exceeds the threshold values.

並列關鍵字

Arduino ； nanorod ； hydrogen sensor ； indium tin oxide

參考文獻

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