電漿前後處理對射頻電漿輔助化學氣相沉積法沉積類鑽碳膜之影響

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電漿前後處理對射頻電漿輔助化學氣相沉積法沉積類鑽碳膜之影響

The effects of plasma pre-treatment and post-treatment on the diamond-like carbon films synthesized by RF plasma enhanced chemical vapor deposition

吳英傑 , Masters　　Advisor：曾信雄　　

繁體中文

類鑽碳膜；前處理；後處理；電漿輔助化學氣相沉積；氬氣；氫氣； DLC ； pre-treatment ； post-treatment ； PECVD ； Argon ； hydrogen

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Diamond-like carbon (DLC) films were deposited by RF plasma enhanced chemical vapor deposition and the effects of pre-treatment and post-treatment of H2 or Ar plasma and the effects of C2H2/H2 and C2H2/Ar ratios on the structure and properties of DLC films were investigated. In the plasma pre-treatment, Ar plasma of different pressures and H2 plasma of different RF powers were used to modify the surface roughness of substrate. For the plasma post-treatment, the effects of post-treatment time and Ar/H2 ratio were studied. Deposition rate, surface roughness, nanohardness, young’s modulus, Raman analysis, residual stress and nano-wear depth of DLC films after various treatments were measured.
    Surface roughness characterized by AFM showed that plasma pre-treatment modified the substrate surface roughness, which will affect the roughness of the DLC films. However, the structure, hardness and residual stress of DLC films were not influenced by the plasma pre-treatment. For the DLC films deposited using different C2H2/Ar or C2H2/H2 ratios, it was found that as the C2H2/Ar or C2H2/H2 ratio was reduced, surface roughness, hardness and sp3/sp2 ratio decreased, and that the residual stress and the wear depth of the DLC films were also influenced by the C2H2/H2 ratio. For the Ar or H2 plasma post-treatment, surface roughness decreased with increasing treatment time. Hardness and the wear characteristics were also modified by the plasma post-treatment. However, the residual stress was independent of the Ar or H2 plasma post-treatment.

Reference ( 50 ) 〈TOP〉

[1] Enke K.Hard carbon layers for wear protection and antireflection purposes of infrared devices. Applied optics 1985;24:508-12.
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[2] Robertson J. Improving the properties of diamond-like carbon. Diamond and Related Materials 2003;12:79-84.
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[3] Robertson J. Requirements of ultrathin carbon coatings for magnetic storage technology. Tribology International 2003;36:405-15.
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[4] Lee KY, Fujimoto K, Ohkura S, Honda S, Katayama M, Hirao T. Study of electron field emission and structural properties of nanostructured carbon thin films deposited by hot-filament-assisted reactive sputtering using methane gas. Vacuum 2002;66:239-43.
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[5] Ma WJ, Ruys AJ, Mason RS, Martin PJ, Bendavid A, Liu Z, Ionescu M, Zreiqat H. DLC coatings: Effects of physical and chemical properties on biological response. Biomaterials 2007;28:1620-8.
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