Sol-gel Synthesis and Characterization of Y(subscript x)Zr(subscript 1-x)O(subscript 2-x/2) Nanopowders for CMP Application

以溶膠－凝膠法製備奈米級Y(下標 x)Zr(下標 1-x)O(下標 2-x/2)粉末於化學機械研磨上應用

蘇旺申(W. S. Su) ； 涂肇嘉(G. C. Tu) ； 蔡明蒔(M. S. Tsai) ； 黃銘賢(M. H. Huang)

《材料科學與工程》 35卷4期 (2003/12) Pp. 250-255

https://doi.org/10.6409/JMSE.200312.0250

摘要

以Sol-gel法製備Y(下標 x)Zr(下標 1-x)O(下標 2-x/2) （x=0、0.03、0.08及0.12）粉末，製成凝膠經由水洗後，探討不同比例之Y(上標 3+)含量，對其晶相結構（單斜晶、正方晶及立方晶）變化、size及有效面積之影響。煆燒到800℃時產生結晶相變化，結果發現不同的釔摻雜含量造成四種粉末ZrO2、Y0.03Zr0.97O1.985、Y0.08Zr0.92O1.96及Y0.12Zr0.88O1.94，晶相分別爲m、t+m、t+c、c，形成單一晶相或複合晶相。在Y(下標 x)Zr(下標 1-x)O(下標 2-x/2)粉末中，Y(上標 3+)摻雜含量愈高則使粉末在相同煆燒條件下，以SEM及TEM法觀查得知可得到較小之Crystallite Size。

關鍵字

奈米粉末 ； 釔摻雜氧化鋯 ； 溶膠－凝膠法 ； 化學機械研磨

並列摘要

Y(subscript x)Zr(subscript 1-x)O(subscript 2-x/2) (x=0, 0.03, 0.08 and 0.12) powders were synthesized by Sol-gel method. The crystalline structure, particle size, size distribution and specific surface area of various concentrated yttrium oxide in doped zirconia powders were investigated. The crystalline phase transformation calcined at 800℃ was observed for the various yttrium concentrations, ZrO2, Y0.03Zr0.97O1.985, Y0.08Zr0.92O1.96 and Y0.12Zr0.88O1.94, which were m(monoclinic), m+t(tetragonal), t+c(cubic) and c phases respectively. The particle sizes were measured from SEM and TEM analysis, which decreased with the increasing yttrium concentration.

並列關鍵字

Nanopowder ； Yttrium-doped Zirconia ； Sol-gel ； Chemical Mechanical Polishing