Thermal Outgassing from Stainless Steel Vacuum Chambers

陳俊榮(J. R. Chen) ； 劉遠中(Y. C. Liu)

《Chinese Journal of Physics》 24卷1期 (1986/04) Pp. 29-36

並列摘要

The thermal ougassing rates of SUS 304 stainless steel vacuum chambers were measured by using the throughput method. Several kinds of treatments were studied for the chambers - venting the chamber with gases, filling the chamber with water or prebaking the chamber in the air. The results showed that the treatment of venting the chamber with dry N2 gas had the lowest outgassing rate, 10^(-10) mb．l/s．cm^2 at 4 hours after pump down at room temperature, about six times lower than that of venting the chamber with air. A low outgassing rate of 2 X 10^(-13)mb．l/s．cm^2 was reached at 10 hours after insitu bakeout for the chamber which was vented with dry N2 gas. The chamber which was filled with water had the higher outgassing rate of 9 X 10^(-13)mb．l/s．cm^2. It was observed that the outgassing of H2 gas decreased after prebaking the chamber in the air. Some surface parameters, adsorption isotherms, surface coverages, mean residence time and adsorption energies were calculated for some cases in this work.