- 期刊
The Sensitivity Analysis of a MEMS Microphone with Different Membrane Diameters
並列摘要
In MLMS capacitive microphone design, it is very critical to get highest yielding rate and sensitivity as the two major factors dominate structure design of microphone. The central-post MEMS microphone is introduced in this paper to differentiate from traditional fixed membrane boundary microphone since the construction is simple and only few masks are required in the process so that the yielding can he greatly enhanced. Thus, it is necessary to find the relationship between the sensitivity and dimension of the diameter of the membrane. The main research steps described in this paper include using CoventorWarer to develop one analysis model of MEMS microphone with coupled electro-mechanic system and analyzing the relationship between the sensitivity and the dimension of the diameter of the membrane.
延伸閱讀
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