氧化鋅薄膜感音器製作

The Fabrication of the ZnO Thin Film Acoustic Sensors

張忠誠(Chung-Cheng Chang) ； 陳永源(Yuang-Yang Chan)

《中華民國振動與噪音工程學會論文集》 1994 (1994/06) Pp. 85-89

https://doi.org/10.30028/CSSVANNUAL.199406.0085

摘要

本實驗主要是研製氧化鋅薄膜感音器，其中包含了感音器的設計，壓電薄膜的形成以及感音器的測試等步驟，並對感音器之特性加以分析探討。本實驗是以電化學矽蝕刻截止技術〔1〕，得到所需之氧化鋅一矽基板薄膜共振動腔結構，並配合ZnO壓電材料，當所研製的感音器受到了聲波的震動，使薄膜上之氧化鋅受到應力而產生電信號，所以薄膜越大或越薄將會增加感音器之感度。且由X-ray發現於氧化鋅壓電薄膜沉積在矽基板與二氧化矽基板之品質較沉積於鋁上好，所以便採取ZnO/SiO2結構沉積須要之高品質之氧化鋅薄膜。在交互校準測試中發現自製之感音器對高頻信號比較靈敏。由於感音器是在矽基板製作，因此可以配合感測系統積體化之趨勢，同時在研究上有較大的發展空間。

並列摘要

The fabrication of the ZnO thin film acoustic sensors includes the processes of sensor design, deposition of ZnO thin film, analysis and discussion of acoustic sensors etc. We use electrochemical etching-stop technology to get resonant cavity and use sputter to deposite ZnO on the back. Then the sensors subjected to acoustic stress will generate electric signal, and we find that sensitivity will be increased with larger or thinner films. From X-ray analysis, we find quality of ZnO piezoelectric thin film deposited on Si or SiO2 substrate is better than on A1, so we use ZnO/SiO2 structure to deposite ZnO thin film of high quality. The response of self-fabrication acoustic sensors is more sensitive to high frequency in reciprocity principle. Because the acoustic sensors are fabricated on Si substrate, so they are compatible with IC process of sensor system, and we have larger developement in research.