具無線傳輸之十六方位量熱式風速風向儀

Multi-directional Calorimetric Anemometer with Wireless Transmission

洪孟璋(Hong Meng-Zhang)

指導教授 ： 李佳言

國立屏東科技大學/工學院/材料工程研究所/碩士(2022年)

https://doi.org/10.6346/NPUST202200114

摘要

本研究利用微機電系統(Micro-Electro-Mechanical System, MEMS)製程設計並製作出量熱式風速風向感測儀，先將P型矽(Silicon, Si)基板以低壓化學氣相沉積系統(Low Pressure Chemical Vapor Deposition, LPCVD)沉積雙面氮化矽(Si3N4)薄膜，於拋光面利用微影製程定義圖形，並利用電子束蒸鍍法沉積白金(Pt)與鉻(Cr)之金屬薄膜，再搭配金屬剝離法(Lift-off)定義出白金電極感測層的圖形後，再次使用電子束蒸鍍法沉積黃金(Au)與鉻(Cr)的金屬薄膜，並利用微影蝕刻製程完成導電電極層，最後於背部利用微影製程配合反應式離子蝕刻(RIE)定義出濕式蝕刻範圍後，使用氫氧化鉀(KOH)溶液進行濕蝕刻，完成量熱式風速風向感測器晶片。
本研究基於白金的正溫度係數特性，設計30 Ω、50 Ω、70 Ω三種不同電阻值的微型加熱器，在固定加熱功率下進行測試，並將電阻值100 Ω的電阻溫度感測器分別升溫至100℃、130℃、150℃三種溫度值，且於最高風速10 m/s的風洞中測試，經由上述實驗結果，選擇低功耗且溫度變化量最大的30 Ω作為微型加熱器，將感測器溫度定溫在最大靈敏度的150℃，並利用氣流所引起的溫度差，形成相對輸出差異，再透過虛擬儀控程式LabVIEW進行風速風向程式演算與遠端人機介面顯示。
關鍵字：風速儀、量熱式、微機電系統、微型加熱器、電阻溫度感測器

關鍵字

風速儀 ； 微型加熱器 ； 量熱式 ； 電阻溫度感測器 ； 微機電系統

並列摘要

This study is based on MEMS technology to design a calorimetric anemometer. A silicon nitride substrate deposited by Low-Pressure Chemical Vapor Deposition (LPCVD) is initially deposited with platinum (Pt) and chromium (Cr) by Electron Beam Evaporator (EBE). After completing the fabrication of platinum electrodes, Gold (Au) and Chromium are deposited on the chip by EBE. Then, the electrode layer is completed by the lithography and etching processes. After all, the chip is conducted by Reaction Ionic Etching (RIE) and wet etching to complete the calorimetric anemometer.
Based on the platinum’s positive temperature coefficient of resistance (TCR), the processed chip is composed of a temperature sensor with 100 Ω resistance and micro-heaters of three different resistance values. To find the best of the three, the sensor is located and tested in a wind tunnel with wind speeds of maximum 10 m/s and the chip is heated to 100℃, 130℃ and 150℃. After the tests, the 30 Ω resistor with the lowest power consumption and the largest temperature change was selected to be the micro heater. It is found that the sensor of 150℃ shows the maximum sensitivity, and then the temperature differences caused by the airflow can form the relative output differences
Eventually, the flow rate and direction can be remotely operated by LabVIEW and then displayed on a screen.
Keywords：Anemometer, Calorimetric, MEMS, Micro-heater, RTD

並列關鍵字

Anemometer ； Micro-heater ； Calorimetric ； RTD ； MEMS

參考文獻

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