Study of Force-feedback Tactile Sensor Fabricated by AlN Doped ZnO Piezoelectric Film

參雜氮化鋁之氧化鋅壓電薄膜製備力回饋觸覺感測器研究

李昆達(Kun-Dar Li) ； 任春平(Chun-Ping Jen) ； 林大偉(David T.W. Lin) ； 郭珈妘(Jia Yun Kuo) ； 沈裕傑(Yu-Jie Shen) ； Ashwin Verma ； 詹世基(Shih-Chi Chan) ； 劉凱哲(Kai-Che Liu)

《中國機械工程學刊》 39卷2期 (2018/04) Pp. 207-213

摘要

In this study, we have developed a flexible AlN doped ZnO tactile sensor. This flexible sensor can be applied on the complex surface of the device. The tactile sensor is fabricated by AlN doped ZnO thin film deposited on the flexible polyimide (PI) substrate or copper substrate. The sol-gel method and spin-coating method are utilized to prepare the AlN doped ZnO piezoelectric films. We have also investigated the influences of the speed of spin-coating on the crystallinity and piezoelectric properties of the thin films. The methods of X-ray diffraction and scanning electron microscopy are used to examine the crystallinity and the surface topography of the AlN doped ZnO thin films. In addition, the force-feedback analyses are performed to compare the output voltages between the sensors on the PI substrate and copper substrate. The response of force feedback proves the availability of this flexible tactile sensor and its robust piezoelectric properties.

關鍵字

Tactile sensor ； Sol-gel ； Thin film ； ZnO ； AlN

並列摘要

本研究主要應用氮化鋁參雜之氧化鋅壓電薄膜來開發可撓式之觸覺感測器，此觸覺感測器可應用於複雜表面之元件。本觸覺感測器元件是利用溶膠凝膠法和旋轉塗佈法，將氮化鋁參雜之氧化鋅壓電薄膜製作於聚醯亞胺(PI)基板或銅基板上。本研究同時探討薄膜製程中旋轉塗佈轉速對於氧化鋅壓電薄膜結晶性及壓電效應之影響。透過X-ray繞射分析與掃描式電子顯微鏡來觀察所開發之氧化鋅壓電薄膜的結晶性質及表面形貌，並且對在不同基板上之壓電薄膜進行力回饋響應測試。由力回饋量測實驗中可證實本研究之可撓式觸覺感測器具有可行性與強化之壓電特性。