本實驗是使用3,3’,4,4’-benzophenone tetracarboxylic dianhydride 及hexafluoro-isopropylidene diphthalic dianhydride雙酐單體與具有不同烷基團分子大小之雙胺單體,4,4-methylenedianiline、4,4–methylenebis-(2,6-dimethylaniline)、4,4-methylenebis-(2,6-diethylaniline)及4,4-methylenebis-(2,6- diisopropylaniline)反應,以形成聚醯亞胺,來探討烷基團分子大小的改變對聚醯亞胺熱性質、介電性質及電氣性質的影響。 由本實驗顯示,改變烷基團分子大小會造成聚醯胺酸黏度值改變,且隨烷基團分子增大而降低,此顯示著增加烷基團體積大小會造成立體障礙效應的增加,有助於內部自由體積的變大。介電係數值的量測也反應出上述的結果。由本實驗可得知改變烷基團的大小可將介電值由3.5降低到3.0以下,當聚醯亞胺含有氟原子時。 此外,熱性質的測量也反應出增大烷基團分子會降低熱穩定性,但其3%裂解溫度均可維持在420℃以上,仍然可適用於半導體金屬化製程之條件。
In this thesis, two series of polyimides containing different alkyl group were synthesized by 3,3’,4,4’-benzophenone tetra carboxylic dianhydride and hexafluoro-isopropylidene diphthalic dianhydride with 4,4’-methylenedianiline, 4,4’-methylenebis-(2,6-dimethylaniline), 4,4’-methylenebis-(2,6-dimethlyaniline) and 4,4’-methylenebis-(2,6-diisopropylaniline), respectively, in order to study the effect of the molecular structure of pendant groups on the thermal properties and electric properties of polyimides. The influence of alkyl substitutes on the thermal properties of polyimides was investigated by differential scanning calorimeter and thermogravimetric analyses techniques. Our results showed that the incorporation of alkyl size chains on the ortho position to amine group leads to a slight decrease in thermal stability. All polymers possessed a decomposition temperature higher than 450℃. In addition, the measurement of dielectric constant shows slightly dependent on the size of free volume. When the size of alkyl group is larger, the dielectric value is lower. The lowest dielectric value could be less than 3.0, when the fluorine atoms are incorporated into the polyimides.