鍍金及鍍銀夾層對在透明導電玻璃基板上氧化鋅奈米結構之形貌影響及材料分析

Fabrication and Characterizations of Zinc Oxide Nanostructures on ITO Glass Substrates Incorporating Gold or Silver Sandwiched Layers

張廷瑋(Ting-Wei Chang)

指導教授 ： 陳祥

國立暨南國際大學/科技學院/應用材料及光電工程學系/碩士(2017年)

摘要

我們知道有許多種方法可以合成生長氧化鋅奈米柱，例如：化學氣相沉積法（CVD）、金屬有機化學氣相沉積（MOCVD）、物理氣相沉積（PVD）、電子束蒸鍍（E-beam evaporation）、電化學沉積法(ED)、水熱法(Hydrothermal)等。於是我們利用簡易的電化學沉積法和水熱法，在ITO玻璃基板上合成高質量的氧化鋅奈米柱陣列。首先我們使用電化學沉積法在基板上製造氧化鋅晶種層，再用水熱法合成氧化鋅奈米柱。此外，我們為了增強黏附性和提高介面性能，使用了e-gun電子束蒸鍍的方式，分別沉積金屬金和銀在ITO玻璃基板和氧化鋅奈米柱之間當作夾層。為了量測分析材料表面形貌、晶體結構和光學性質，於是透過冷場發射掃描式電子顯微鏡(FE-SEM)、X光繞射分析儀(XRD)、化學分析電子能譜儀(XPS)、微光致發光光譜儀(Micro-PL)、接觸角分析(Contact Angle)、原子力顯微鏡分析(AFM)對氧化鋅奈米結構作分析。
結果證明，氧化鋅奈米柱/金/ITO玻璃基板和氧化鋅奈米柱/銀/ITO玻璃基板的結構能夠發現各種不同的材料特性及光學性質。氧化鋅奈米柱/貴重金屬/ITO玻璃基板這種結構有希望成為以氧化鋅為基礎的奈米結構應用於生物醫學及光電子元件的使用上。

關鍵字

氧化鋅奈米柱 ； 氧化銦錫 ； 金 ； 銀 ； 表面形貌 ； 夾層結構

並列摘要

High quality zinc oxide nanorod (ZnO NR) arrays were grown on indium-doped tin oxide (ITO) substrates by electrochemical/hydrothermal deposition. Electrochemical deposition was first used to fabricate the zinc oxide seed layer and hydrothermal methods were then used to synthesis ZnO NR arrays. In addition, to enhance adhesion and improve the interfacial properties, e-gun were used to deposited a layer of gold and silver metal sandwiched between ZnO NR and ITO glass substrates, respectively. To characterize the morphologies, crystalline structures and optical properties for the ZnO NR/Au/ITO and ZnO NR/Ag/ITO structures, field emission scanning electron microscopy (FESEM), atomic force microscope(AFM), contact angle, X-ray diffractometer (XRD), X-ray photoelectron spectroscopy (XPS), and Photoluminescence (PL) were used to analyze the ZnO NR arrays, respectively. Results indicate that various material and optical properties could be found on ZnO NR/Au/ITO and ZnO NR/Ag/ITO structures. The ZnO/noble metal/ITO structures are
promising for future ZnO NR-based biomedical and optoelectronic device applications.

並列關鍵字

ZnO nanorods ； ITO ； Au ； Ag ； morphology ； sandwiched layers

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