The first nearest-neighboring distance of Ga impurity in A-15 compound, V75Ge20Ga5, has been obtaiued by using the EXAFS technique. From this distance and the knowledge of lattice structure, we have found that Ga impurity substitutes the Ge atom in the compound. This reasonable result has indicated the capability of EXAFS for the deter mination of the impurity location in A-15 compound.