- 學位論文
具即時波長補償與雙角度量測麥克森干涉儀之研製
Development of Michelson Interferometer with Wavelength Compensator and Dual Angle Measurements
摘要
為了將精密干涉儀微型化與簡易化成可在工程上實用的感測器，並加強安裝時的寬鬆性，不造成使用上的障礙，本研究使用鍾一正先生的多工式干涉模組(versatile interferometric module, VIM)做為感測器的核心元件，利用偏極化光學理論和四通道光感測器陣列來優化系統的性能。搭配上分光系統、偏極光學元件、四象限感測器以及穿透式光柵，實現具波長補償之麥克森位移量測方式，並且可以同時量測移動軸向的俯仰角和偏擺角。在訊號處理方面，提出了硬體電路和軟體演算法，進行前級訊號修正、後級訊號即時處理、訊號計數、細分割等動作，為一通用式的訊號解析模組。 完成之整套感測器系統包含了麥克森干涉儀、自動視準儀、波長補償模組。其位移精度經NMM實驗驗證後優於32 nm，量測範圍最高可以達到單方向50 mm；自動視準儀在定距離±30 arc sec量測時精度為±0.3 arc sec，當量測鏡進行長距離之線性運動時，量測精度也都優於±0.7 arc sec；波長模組部分在±2°C時可有效補償到波長誤差〔(△λ)/λ〕=10E-6
並列摘要
In order to minimize and simplify the interferometer as a practically useful sensor in industrial use, we use a versatile interferometric module as the core of our sensor. By applying the polarizing theory and four-detector-array, the performance of the sensor can be optimized. Combined with polarizing beam splitter, quadrant detector and transmission grating, the system havs wavelength compensation and it can measure the pitch error and yaw error. This research also presents a general scheme of signal processing by mixing a hardware circuit and a software algorithm, proceeding pre-correction, real-time compensation, wave count and interpolation of the metrology signal. This multi-degrees-of-freedom laser encoder included Michelson interferometer, autocollimator and wavelength compensator. Calibrated with NMM, the accuracy and the measurable range of the three displacement sensor are better than 32 nanometers. The measureable range can be reach to 50 millimeters in one direction. The angular accuracy of the autocollimator is ±0.3 arcsec in static measurement and ±0.7 arcsec in large linear motion measurement. In ±2°C , with the implantation of wavelength compensator, the error of the wavelength is reach to〔(△λ)/λ〕=10E-6 .