電子業揮發性有機物排放特性及其管理之研究

A Study on Characteristics and Management of VOCs Emitted from Electronic Industires

楊玉玲(Yu-Ling Yang)

指導教授 ： 章裕民

國立臺北科技大學/工程學院/環境工程與管理研究所/碩士(2009年)

https://doi.org/10.6841/NTUT.2009.00456

摘要

近年來科學園區為我國高科技產業之重鎮，製程中使用大量揮發性有機溶劑及特殊化學物質，所產生的臭味及致癌風險仍是屢屢引起園區附近居民及園區作業人員之陳情，依科學園區管理局核發許可登載統計A科學園區之廠商於96年核發許可之揮發性有機污染物排放量為340.037公噸/年，揮發性有機氣體（VOCs）。本研究係針對國某科學園區半導體產業13家、光電產業4家及光碟產業2家所排放之揮發性有機污染物，進行原物料使用分析、檢測查核、防制效能評估等盤查，並以煙道定性定量檢測分析值比對各廠商原物料使用情形，探討不同製程及防制設備之處理效能，以期作為電子業相關管制策略之參考。
依據本研究結果發現，國內該（A）園區半導體產業VOCs排放主要成分為異丙醇IPA（47.03％），次為丁酮MEK（23.28％）、丙酮（22.12％）；光電產業VOCs排放主要成份為異丙醇IPA（56.08％），次為乙醇（21.79％）；光碟產業VOCs排放主要成份為異丙醇IPA（73％），故A園區產業排放均以有機溶劑異丙醇（IPA）為主，乙醇、丙酮和丁酮（MEK）次之。
另本研究亦發現揮發性有機氣體(VOCs)處理設備之效率，除活性碳吸附設備效率於50％ ~ 70％，沸石濃縮轉輪及活性碳流體化床處理設備均在85％ ~ 98％之間，但VOCs本身物化特性嗅味閾值範圍大都在數十ppb至數百ppm，其成份嗅味閾值是較敏感的，由本研究結果可知半導體及光電產業均有某些物質達到嗅味閾值，因此建議針對此特殊性物質宜明訂相關法規管制及規範，亦應修正或增加相關法規規範，方能達成有機廢氣排放臭味及致癌風險的最佳控制策略。

關鍵字

高科技產業 ； 活性碳吸附設備 ； 沸石濃縮轉輪 ； 活性碳流體化床 ； 揮發性有機物

並列摘要

In recent years, the scientific and technical parks play important roles for the high technology industry in Taiwan, but fetid odor and carcinogens are always stated and complained repeatedly by the nearby inhabitants and the operating workers in the science park, due to the factories consuming the massive volatile organic solvents and special chemical materials in manufacturing procedures. According to the statistic data of the issued permission from Science Park Administration, volatile organic compounds (VOCs) emission from all factories were up to 340.037 tons/yr in （A）Science Park, located in Hsinchu, in 2007.
This study focuses on VOCs discharged from thirteen semiconductors, four optoelectronics and two CD factories to analyze the raw materials, to check the detection and to evaluate the efficiency of air pollutant control equipment in （A）Science Park. Furthermore, this study discusses the treatment efficiency of different manufacturing procedure and the pollution prevention system through comparing between the discharge pipe qualitative and quantities analysis and the raw material analysis, in order to propose the control strategies of the electronics-related industry.
The study reveals these findings that, the major discharged VOCs components are isopropyl alcohol (IPA), methyl ethyl ketone (MEK) and acetone for semiconductor industry, IPA and ethyl alcohol for optoelectronic industry and IPA for CD industry in（A）Science Park. Therefore, the discharged organic solvents include IPA, ethyl alcohol, acetone and MEK. In addition, the study also shows VOCs removal efficiency of pollutant prevention equipment. For example, VOCs removal efficiency of zeolite concentration runner and activated carbon fluidized bed equipment is up from 85% to 98%, but that of activated carbon adsorption equipment is only from 50% to 70%. The smell threshold value of some particular materials discharged from the semiconductor or optoelectronic industry are closed to the limiting value of Air Pollution Prevention Law. Therefore, the study strongly suggests to increase or revise the relative laws and regulations in view of particular materials to settle the optimizing control strategy for fetid odor and carcinogens.

並列關鍵字

High Technology Industry ； Active Carbon Adsorption Equipment ； Zeolite ； Concentration Runner ； Active Carbon Fluidized Bed Equipment ； Volatile Organic Compounds（VOCs）

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