摘要
本研究為改良自行研製的第二代模內壓力感測器及設計新型壓力感測器，在本文中分別稱為第三代、第四代及第五代壓力感測器。在第二代壓力感測器中有三項缺點：第一，在工作環境測試中，當壓力遽升時，因為結構強度不足所以壓電晶體容易碎裂失效。第二，絕緣不良，容易產生短路失效。第三，加工精度不足，導致壓電晶體的反應不穩定。針對三項缺失，本研究在壓電晶體承體部份先後作以下改良；一：利用陶瓷的絕緣性及剛性強的優點來作為壓電晶體承體。二：利用鐵氟龍的絕緣性及耐高溫特性，結合彈簧緩衝，避免壓電晶體短路及碎裂而失效。三：以鐵氟龍製成壓電晶體承體，搭配彈簧墊圈，保護感測器內部結構。第三代、第四代及第五代壓力感測器模型均做結構力學的靜、動態分析，包括壓力感測器工作應力分析，模內壓力與電壓輸出之相應關係，自然頻率、振型及諧振響應分析。由分析結果知其機械特性均優良，其中第三代壓力感測器實作測試結果良好，第四及第五代僅作模擬分析,由分析顯示，自然頻率分別為1.7kHz及10kHz以上，可提高壓力量測時工作頻寬之範圍。
並列摘要
This research is to improve the second generation of mold cavity pressure sensor which was made by oneself and a new pressure sensor is designed, in this paper, which are called the third generation pressure sensor, the fourth generation pressure sensor and the fifth generation pressure sensor . There are three shortcomings in the second generation of pressures sensor: First, in the working environment is tested, when rising hurriedly in pressure, because the strength of structure is insufficient so the piezocrystal is easy to crack. Second, insulation is bad, it is easy to the short circuit and lose function. Third, the machining accuracy is insufficient, it is unstable to cause the response of the piezocrystal. To three disappearances, in this study, the structure of piezocrystal is improved as follows：Utilize insulation of ceramics and rigidity is strong to as the piezocrystal structure. Utilize insulation of the Teflon and its high-temperature characteristic, combine the spring to buffer, prevent the piezocrystal structure from shorting out, cracking and malfunctioning. Utilize the Teflon to make the piezocrystal structure，combine with the spring washer as the inside structure of the pressure sensor to protect the pressure sensor. The third generation pressure sensor , the fourth generation pressure sensor and the fifth generation pressure sensor both do the static, dynamic analysis of structural mechanics, including the working stress analysis of pressure sensor , the relation that the pressure corresponds with what the voltage outputs in the mold, natural frequency, modal shape and transient analysis. It is known by the analysis result that theirs mechanical characteristic are fine, the third generation pressure sensor make test result to be good , the fourth generation pressure sensor and the fifth generation pressure sensor are only analyzed, according to the analysis, natural frequency can reach 1.7kHz and 10 kHz, it can promote the range of working frequency while survey pressure.