低成本壓力感測器之研製

本論文研究目的在於研發低成本塑膠射出成型之模內壓力感測器。主要設計目標有三：1. 降低生產製造成本，2. 希望將部份IC納入感測器結構內而仍輕薄短小， 3. 維持應有的基本機械特性。採用一般CAE及CAD軟體進行模擬與分析，分析項目包括：探針之挫曲，接觸壓電分析；探針及整體感測器之結構模態、簡諧及步階激振響應等動態分析。經由反覆地分析、實測、評估與修改，有以下三種壓力感測器符合設計要求：Ⅰ、探針式內建積體電路，Ⅱ、純探針式，Ⅲ、封閉式壓力感測器。並依設計藍圖製作出實體，加工成本不超過一萬五元。

關鍵字

壓力感測器；低成本；探針； PZT

並列摘要

A low cost pressure sensor used in plastic injection die is developed in this study. A lot of efforts were exerted for this design to achieve three targets: 1. reduction of the production cost, 2. includes certain circuit units inside sensor with body being small and light, 3. preserve the deserved mechanical characteristics. Adopt typical CAE and CAD packages to perform simulations and analysis for a designing sensor. It is analyzed that the project includes：1. probe buckling, 2.contact analysis between probe and piezocrystal, 3. modal analysis for the probe and integral structure. 4. responses of harmonic exciting as well as step load. After a succession of evaluation, analysis, test and rectification. There have three kind of pressure sensors could be met the requirement：Ⅰ、Probe type with integrated charge amplifier. Ⅱ、Simple probe type without integrated charge amplifier. Ⅲ、Closed cap pressure sensor. Finally a solid of prototype sensor is made, but the fabricating cost is lower than 15000 NT dollars.

並列關鍵字

pressure sensor ； low cost ； probe ； PZT

參考文獻

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