摘要
由於光電產品不斷推陳出新，光學元件的需求日益增加，且品質要求也越來越高，干涉儀已成為精密量測不可或缺的重要儀器。其用途主要在光學元件曲率半徑，平整度和角度的量測，同時並可用來做光學系統之整體組裝測試。由於菲佐式干涉儀雙光路和單一光軸的特性使其有較鬆的公差，易於組裝。目前國內已有廠家成功開發菲佐式干涉儀，並已逐漸打開國際市場，本文旨在介紹國內開發之菲佐式干涉儀現況。
並列摘要
Nowadays, the Fizeau interferometer has become the most popular measuring instrument in the production of high precision optical element and component because of its various applications in the measuring of radius of curvature, surface flatness, angle of prism and system alignment. The Fizeau interferometer is a type of double path with single optical axis system which make lose tolerance and easier to do the alignment than other types of interferometers. There is a company in Taiwan which has successfully developed this type of interferometer and has sold more than 200 sets worldwide.