Development of a Low-Cost Micro-CMM with Nanoscale Touch Trigger Probe and Novel Optical Encoder

具奈米級觸發式探頭與創新型光學尺之微型三次元座標量測儀的研製

朱志良(Chih-Liang Chu) ； 劉育宏(Yu-Hung Liou)

《中國機械工程學刊》 29卷6期 (2008/12) Pp. 467-474

https://doi.org/10.29979/JCSME.200812.0004

摘要

本研究開發出一低成本的微型三次元座標量測儀。量測儀中包含有一自行研製而成的奈米級觸發式探頭與創新型的三軸光學尺系統，而量測儀的結構是採用具有較佳剛性與穩定性的雙拱型橋架設計。為提高量測儀的量測精度，於架設光學尺系統時，將三軸光學尺的量測軸全部通過探針前端圓球，以符合阿貝原理。所完成的微型三次元座標量測儀具有0.12μm 的定位精度與10x10x10 平方公厘的量測範圍，且奈米級觸發式探頭之任意接觸方向的預行程變化量小於96 nm。

並列摘要

This study develops a low-cost micro-CMM system incorporating a nanoscale touch trigger probe and a novel three-axis optical encoder based upon modified commercial DVD pickup heads. The measurement performance of the proposed system is enhanced through the use of a rigid aluminum double-arch-bridge structure to support the touch trigger probe. The measurement performance is further improved by constructing the three-axis optical encoder in such a way that all three axes pass through the probe tip, thereby suppressing the Abbe error. The experimental results indicate that the micro-CMM has a working volume of (10) mm^3 and a positioning accuracy of 0.12 μm. Furthermore, the pre-travel distance of the touch trigger probe in the X-Y plane is found to vary by no more than 96 nm, while that in the X-Z plane varies by no more than 44 nm.

並列關鍵字

micro-Coordinate Measuring Machine ； optical encoder ； double-arch-bridge structure