- 學位論文
基於布拉格光纖光柵之介尺度三維量測研究
The Study of Fiber Bragg Grating Based Meso-scale Three-dimensional Measurement
摘要
全球當前量測技術於介尺度三維量測上遭遇到瓶頸。過去十年，全球各主要國家的研究組織進行多項與探頭感測器相關的研究工作，但並沒有太大的突破，例如燃油噴嘴孔徑的三維形貌量測，沒有適當儀器可得知元件之加工精密度，主要原因在於提出的方法及設計，無法應用在高深寬比的結構上。 本研究提出一種高靈敏度的光纖探針式探頭光學感測技術，可應用於介尺度之特徵結構，基於布拉格光纖光柵原理，搭配光學相位感測及解相位技術，利用雷射干涉儀（HP5529A）提供位移量測標準，以壓電柱提供增量位移，預期可大幅提昇探針式探頭感測技術的位移解析度，降低量測的不確定性。 預行程是探針式探頭感測器主要的誤差來源，本系統量測過程僅需判斷探針式頭觸發之訊號，側向預行程可達10奈米，突破了澳洲學者Ji無法解析探頭側向加載過程之情形，並可提升量測的準確度並節省量測時間。該技術具有建構容易、成本低及解析度高等優勢。
並列摘要
The worldwide metrology in meso-scale three-dimensional topography encounters a bottleneck. Over past a decade, the major countries over the world, cooperated with world-renowned research organizations to carry out a number of research work related to the probing sensors, but there is no great breakthrough. As an example for three-dimensional topology of the fuel nozzle aperture measurements, there is no appropriate instruments which can be learn of the manufacturing accuracies of components. The main reason relies on the fact that known methods and designs fail in measuring microstructures with high aspect ratio. In this study, an optical sensing technique of fiber probing head is proposed. It has high sensitivity and can be applied in the characterization of the meso-scale structures. The operation principle is based on fiber Bragg grating principle, and optical interferometry (HP5529A) provide displacement measurement standards, and provide incremental displacement piezoelectric column, which is expected to significantly enhance the resolution of the probe sensing displacement to reduce the measurement uncertainty. The pre-travel is the major error source for micro coordinate measuring systems. Our probing sensing technique is touch-triggered. Experimental results demonstrate that our probing sensor has an in-plane pre-travel of 10 nm. The specification outperforms the one of Ji’s method. Accordingly, our probing sensor can effectively improve the measurement accuracy. It has many merits: easy build-up, low cost and high-resolution.