具影像觀察功能之微奈米級三次元接觸式掃描探頭研製

Fabrication of a Contact Type Scanning Probe for Micro/Nano CMM with an Observing Unit

潘韋廷(Wei-Ting Pan)

指導教授 ： 范光照

國立臺灣大學/工學院/機械工程學研究所/碩士(2010年)

https://doi.org/10.6342/NTU.2010.01547

摘要

現今的工程製造量測技術，對於量測微小尺寸工件往往受限於量測探頭的性能而無法達到應有的精度水準。各國研究機構為了解決此問題，多使用價格昂貴的感測設備與製造技術。
本研究發展出一套用於微奈米級三次元座標量測儀上之低成本、高精度的接觸式掃描探頭，以懸浮片結構結合探針為基礎，再以市售的光碟讀取頭（DVD Optical Pickup Head）為感測器，測量探針接觸到工件時探球的三維位置變化。
探頭在性能上可達到高精度和各方向性能均勻的要求，具有20微米的量測範圍並且加上了影像裝置可以在量測的過程中判定探針是否將要與工件接觸，可提升量測的準確度並節省量測時間。
在接觸式探針上利用自行燒製的光纖球頭作為探針的尖端球頭，並利用實驗設計的概念找出最佳的製作參數。

關鍵字

三次元量測探頭 ； DVD光學讀取頭 ； 位移量測 ； 角度量測 ； 光纖探球 ； 二階因子實驗

並列摘要

In the modern metrological technology, traditional coordinate measuring machines (CMM) was not able to satisfy certain precision and accuracy in micro/nano scale due to the performance of the probing systems. The probing system is the limiting factor in the downscaled CMM. Many research institutes develop the probe system with expensive instruments as sensors and complex manufacturing processes.
In this research, a low cost, high precision contact scanning probe for Micro/Nano CMM is developed. Based on suspension structure with stylus, the sensor of the probe is commercial DVD optical pick head which is able to measure the 3-D displacement of the stylus tip.
The performance of probe can achieve high-precision and uniform characteristic. the measurement range is 20 micron meter. The probe is equipped with CCD image device in order to promote precision and save the measuring time.
The tip-ball of stylus is made from optical fibers. In this research, a method of experiment design is employed to find the best parameter of fabrication

並列關鍵字

CMM probe system ； DVD pick up head ； distance measuring ； angle measuring ； fiber tip ball

參考文獻

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