具影像觀察功能之微奈米級三次元接觸式量測探頭分析與研製

The Analysis and Fabrications of a Contact Type Measuring Probe for Micro/Nano CMM with an Observing Unit

林家佑(Chia-Yo Lin)

指導教授 ： 范光照

國立臺灣大學/工學院/機械工程學研究所/碩士(2008年)

https://doi.org/10.6342/NTU.2008.01331

摘要

現今的工程製造量測技術，對於量測微小尺寸工件往往受限於量測探頭的性能而無法達到應有的精度水準。各國研究機構為了解決此問題，多使用價格昂貴的感測設備與製造技術。
在接觸式探頭方面，將原有的光纖探球製造程序改良，減少製造時間、提升探球尺寸的穩定性。利用懸臂桿結構作為力產生元件，由分析運算及模擬檢驗其水平方向的等剛性，並由此模型找出適合的觸發方式。在感測器方面，將已商業化的DVD光學讀取頭加以改良，提升光源穩定性。並於探頭內部置入一影像感測系統，觀察探球與工件間距，提升量測的準確度並節省量測時間。最後經由設計與組裝完成一輕量化、接觸力小之微小化接觸式量測探頭。

關鍵字

三次元接觸式量測探頭 ； DVD光學讀取頭 ； 位移量測 ； 角度量測 ； 光纖探球 ； 接觸力量測 ； 二階因子實驗

並列摘要

In the modern metrological technology, coordinate measuring machings (CMM) can’t satisfy certain precision and accuracy in micro/nano scale due to the performance of the probing systems. The probing system is the limiting factor in the downscaled CMM. Many research institutes develop the probe system with expensive instrucments as sensors and complex manufacturing processes.
To reduce the cost and fulfill these requirements, this study considers three main issues related to the development of the touch probe system: the fabrication of an appropriate touch probe with micro scale dimension and small mass; the cantilever beams structure with isotropic stiffness in the horizontal plane; and, DVD pick up heads as a high sensitivity sensors in distance and angle measuring.
Using the clean feature of an economical fiber fusion splice system, a silica fiber probe fused spherical tip with a diameter of about 270-450 µm is made. The average of the roundness of the tip balls is 0.84 µm and the average of the offset between the axle of the fiber and the center of the tip ball is 1.03 µm. The procedure is simplified and it takes less time to make a fiber tip ball with a modified fixture. 2-level factorial experiment design is applied to identify the significant factors and the optimal conditions for fabrication of a tip ball with a desired diameter.
2 tpyes of cantilever beam structures, 3-beams and 4-beams, is introduced. Connecting with the sensing plate, cantilever beam is bent when a force, caused by the interaction between the tip ball and workpiece and transmitted with the stem, is applied on the tip ball. The displacement is calculated and simulated with the bending formulas and the finite element module of CATIA respectively. Those show that the 2 tpyes are both isotropic stiffness in the XY plane. The process of the signal of DVD pick up heads, which are utilized as high sensitivity and high resolution sensors to measuring the displacement and angle of the sensing plate, is also discussed base on the model.
With these components a touch trigger probe system is developed.

Index Terms —CMM probe system, DVD pick up head, distance measuring, angle measuring, fiber tip ball

並列關鍵字

CMM contact type probe ； DVD pick up head ； distance measuring ； angle measuring ； fiber tip ball ； factorial experiment design ； contact force measuring

參考文獻

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