微型三次元量測儀之系統整合與軟體開發

System Integration and Software Development of Micro Coordinate Measuring Machine

葉俊寬(Jyun-Kuan Ye)

指導教授 ： 范光照

國立臺灣大學/工學院/機械工程學研究所/碩士(2011年)

https://doi.org/10.6342/NTU.2011.01790

摘要

本研究為進行微型三次元量測儀之系統整合，將量測儀各自完成之硬體加以整合，並建立一套三次元軟體配合使用，最後進行微型三次元量測儀的實際量測，以實現微型三次元量測儀的建立為目標。
文中將介紹微型三次元量測儀之各硬體部分，包括共平面平台、Z軸、探頭及感測器，感測器包含作為機械原點、背隙補償的DVD讀取頭，以及作為位置回授的線性繞射光柵干涉儀 (LDGI)。
本研究透過自調式類神經PID控制器以控制超音波馬達，進行三軸之大小行程驅動，以及各種軌跡控制；利用雷射干涉儀進行量測儀之精度校正，並使用四象限感測器進行光軸校準，最後建立補償表以提升量測儀之精度；軟體部分則以Borland C++ Builder 6建立基本元件之量測、座標轉換，以及配合掃描式觸發探頭之觸發訊號判斷程式等功能；各元件準備完整後，進行量測儀之實際量測。

關鍵字

微型三次元量測儀 ； 共平面平台 ； 機械原點 ； 線性光柵干涉儀 ； 軌跡控制

並列摘要

This research proceeds the system integration of micro coordinate measuring machine (Micro-CMM). All parts of Micro-CMM which were developed themselves are integrated together. And a set of CMM software is developed to be used. Finally, the measurement of Micro-CMM is proceeded. Achieving the establishment of Micro-CMM is set as the target in this research.
Each part of Micro-CMM would be introduced in the paper, including Co-planar stage, Z axis, probe and all the sensors. Sensors are DVD pick-up heads for machine origins and backlash compensation, and laser diffraction grating interferometer (LDGI) as position feedback.
In this research, ultrasonic motor is controlled by self-tuning neuro-PID controller to drive three axes with large and small stroke, and even any contour control. Laser interferometer is used as calibration of Micro-CMM, and quadrant photo detector is used to align the optical axes. Finally, Mapping-Error is established to promote the precision of Micro-CMM. And the functions for measurement of basic elements, coordinate transformation and trigger judgment of the scanning trigger probe are developed with the Borland C++ Builder 6 software. After all the component prepared, proceed the actual measurement of Micro-CMM.

並列關鍵字

Micro-CMM ； Co-planar stage ； Machine origin ； LDGI ； Contour Control

參考文獻

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