Performance Improvement Analyses for a Cleanroom in MEMS Laboratory

由無塵室所提供之潔淨環境對現代化製程工業及微機電系統而言極為重要且關鍵，然而，由於製程區內某些位置可能產生高濃度粒子，操作污染之控制改善便顯得重要。本文透過實際量測及電腦計算流體力學模擬來探討微機電實驗室之氣流性能及濃度衰減時之污染控制特性，並探討在經濟可行之各種改善策略。結果顯示氣流分佈及濃度衰減皆可經由增加風扇濾網機組或適當增加回風格柵來加以改善，而污染通風效能也可以經由在各不同指定取樣點之濃度衰減曲線加以評估改善之情形，而藉由電腦輔助模擬亦可在無塵室修改建造時提供較佳改善策略，並有效減少嚐試錯誤之時間及努力。

關鍵字

無資料

並列摘要

It is vital to provide particles-free conditions for modern manufacturing industries as well as for micro-electro-mechanical system (MEMS). However, improvement for contamination control is required invariably due to the high particle counts at specific sampling locations. In this study, field measurement and computational fluid dynamics (CFD) simulation were conducted to investigate the ventilating performance through airflow distribution and concentration contours of the cleanroom in MEMS laboratory. Improvement strategies with less expenditure have been proposed and assessed comprehensively. The results revealed that the improvement of airflow and concentration distribution could be achieved by increasing the number of fan-filter units and proper arrangement of the return air grilles as well. Ventilation performance could be assessed and evaluated extensively also by the calculation of contamination concentration decay at specific sample locations. It was also expected that CFD aided simulation could identify strategies for best practice as well as reduce trial-and-error effort while modification of cleanroom was conducted.

並列關鍵字

Cleanroom ； performance improvement ； CFD ； field measurement

國際替代計量

Performance Improvement Analyses for a Cleanroom in MEMS Laboratory

全文下載

主題瀏覽