A New Confocal 3-D full-field Surface Profilometer Employing Image Fibers for Digital Fringe Projection

利用影像光纖數位結構光投射術之全域三維表面形貌共焦量測儀

陳亮嘉(Liang-Chia Chen) ； 黃志弘(Chih-Hung Huang)

《中國機械工程學刊》 30卷5期 (2009/10) Pp. 363-370

https://doi.org/10.29979/JCSME.200910.0001

摘要

本研究結合光纖式數位結構光投射技術與聚焦形貌量測原理，發展出創新式數位共焦之三維顯微量測系統，以創新之光纖式數位結構光投射受測表面方式，搭配主動光強調整控制與飄移式相移量測策略，獲得最佳化之聚焦量測，同時輔以數據濾波以及聚焦深度反應曲線之峰值定位技術，可有效大幅提升系統量測精度與性能。此研發成果可對微小尺寸待測物進行三維輪廓重建，因所研發系統架構可進一步發展可移動式之影像光纖探頭，未來具備發展成為自動化光學檢測(AOI)之可攜式線上量測設備。

並列摘要

The development of a new confocal full-field 3- D surface profilometer using image fibers for digital fringe projection is presented in the article. Threedimensional measurement systems of high precision have been widely applied in high-technology industries and bio-medical areas, especially for micro-scale accuracy measurement. However, due to bulky volume, most of current surface profilometers cannot easily perform 3-D measurement within a space-restricted or in-field inspection environment. To overcome this limit, a new fiber-embedded coaxial optical configuration employing digital fringe projection for confocal measurement was developed to achieve micro 3-D surface profilometry. Surface profilometry of micro component can be accomplished by the developed profilometer which comprises a digital fringe projection system, a coherent image fiber, a set of optical lenses and an image sensing device. Using the proposed confocal measurement principle, the system can obtain out-of-plane measurement accuracy up to 1.02 micrometers. Some industrial micro components can be successfully measured and reconstructed for 3-D surface models. Verified by some real industrial examples, the developed approach is capable of achieving accurate micro 3-D surface profilometry with a maximum measurement error less than 2% of the overall range.

並列關鍵字

surface profilometry ； 3-D measurement ； digital fringe projection ； confocal measurement