光纖式數位共焦三維形貌量測術之研發

Research of Fiber-based Digital Confocal Three-dimensional Surface Profilometry

黃志弘(Chih-Hung Huang)

指導教授 ： 陳亮嘉

國立臺北科技大學/機電學院/自動化科技研究所/碩士(2007年)

https://doi.org/10.6841/NTUT.2007.00295

摘要

目前三維輪廓精密量測於工業界之應用日漸重要，對於微小零件與狹小空間內之三維輪廓線上檢驗需求更是日益提昇。鑑於現有之量測系統多為離線檢測型或實驗室型，且系統之設備成本高昂，本研究運用數位微鏡組裝置(DMD)之數位投射技術，發展一套光纖式數位共焦三維形貌光學量測系統。配合影像光纖與光學鏡組，整合出一可微小化三維量測系統，未來可對狹小空間內物件進行三維輪廓線上精密量測。系統之架構原理，由數位投影裝置(Digital Light Projector)投光經過光學鏡組，將結構光譜聚像至軟式光纖，使用光纖可使得量測取像端獲得可攜性及型體之微小化。在取像系統中加入分光鏡、縮影物鏡、遠心鏡頭與CCD 等裝置，藉由同軸共焦(coaxially confocal)量測原理構成三維輪廓量測系統，系統之量測範圍(FOV)大小可達336 x 252μm，量測景深達數十微米等級，全域量測誤差百分比可控制在3％範圍以內。

關鍵字

自動化光學檢測 ； 三維量測 ； 數位微鏡裝置 ； 光纖

並列摘要

Three-dimensional measurement systems of high precision have been widely applied in high-technology industries and bio-medical areas, especially for micro-scale accuracy measurement. However, due to their bulky volume, most of current surface profilometers cannot perform 3-D measurement within a space-restricted inspection environment. To overcome this drawback, a fiber-based 3-D surface profilometer was developed according to confocal and digital fringe projection principle. Measurement of small objects within a limited space can be achieved by the profilometer which comprises a digital fringe projection system, coherent image fibers and optical lenses. Using confocal measurement and accurate calibration method, the proposed system can obtain out-of-plane depth and reconstruct clouds of surface points accurately.

並列關鍵字

Automatic optical inspection (AOI) ； 3-Dmeasurement ； digital fringe projection ； confocal measurement

參考文獻

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