頻閃干渉式奈米級動態全域三維輪廓量測儀之研製

Development of Nano-scale Dynamic Full-field 3-D Surface Profilometer Using Stroboscopic Interferometry

黃耀庭(Yao-Ting Huang)

指導教授 ： 陳亮嘉

國立臺北科技大學/機電學院/自動化科技研究所/碩士(2006年)

https://doi.org/10.6841/NTUT.2006.00186

摘要

微機電裝置之振動頻譜光學量測為描述機械薄膜特性之重要方法，譬如對微懸臂樑或微薄膜之共振頻率進行量測評估，可取得其材料之楊氏模數和平均殘餘應力，微機電系統之老化特性亦可從其共振頻率及品質因子之變化而推導出。這些重要性質之推導，均有賴於在靜態與動態三維全域表徵顯微量測。量測動態之方式，可使用都卜勒單點動態量測、脈衝雷射動態量測、時間平均法、電子斑點及頻閃光干涉動態量測等方式，然而這些技術除都卜勒單點動態量測外，其它技術並無法提供共振頻譜自動掃描之功能。本文將發展頻閃光干涉動態量測技術，並搭配自動對焦演算法，以進行高頻寬之共振頻率掃描及輪廓量測。本研究所發展之光干涉顯微動態量測儀，同時具備量測靜、動態三維輪廓及共振頻率掃描功能，為一機二用之三維全域表徵顯微量測系統。經由實驗結果驗證，其動態量測之橫向解析及垂直解析可分別逹到μm及nm等級，共振頻率掃描解析可達0.1kHz，而振動頻寛可以逹到3.7MHz以上，量測振幅則可達數十微米以上。

關鍵字

表徵顯微量測 ； 頻閃干涉術 ； 自動共振頻掃描 ； 微機電裝置

並列摘要

A dynamic 3-D nano-scale surface profilometer using stroboscopic interferometric principle with novel automatic resonant frequency identification has been successfully developed. As micro electromechanical systems (MEMS) increaseing rapidly towards industrial application, the needs of accurate dynamic characterization have become a major challenge in design and fabrication. To meet this challenge, an interferometric microscopy based on LED stroboscopic interferometry was developed to achieve static and dynamic full-field profilometry and characterization of MEMS with a measurement bandwidth higher than 3.7 MHz. Furthermore, a detection algorithm based on image contrast measure was developed for the automatic resonant frequency identification. A series of natural resonant modes of an AFM cantilever microbeam can be accurately detected and consistent with the corresponding theoretical values. To verify the effectiveness of the developed methodology, the cantilever beams were measured to analyze its full-field resonant vibratory shapes. The experimental results confirmed that the resonant vibration of the tested beams can be fully characterized and 3-5 nm of vertical measurement accuracy as well as tens micrometers of vertical measurement range can be successfully achieved.

並列關鍵字

dynamic 3-D profilometry ； stroboscopic interferometry ； automatic resonant frequency detection ； micro-electromechanical system(MEMS)

參考文獻

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