摘要
量測技術是工業上尺寸驗證中不可或缺的一環，而隨著東西微小化與精度的提升，顯微量測技術更是日趨重要，相較於接觸式量測非接觸式量測有更大的量測彈性，所以光學顯微量測技術已經成為微小量測的發展趨勢。 本文利用聚焦形貌量測方式(shape from focus)作為理論基礎，並配合自動聚焦函數(auto-focus function)演算理論與雜訊消除技術，進行物體三維輪廓重建(3D profile reconstruction)，並搭配投影條紋法(fringe projection method)，增加光學切片能力與量測正確性，另外加入影像光纖(image fiber)，作為空間調節裝置更適時縮短光路系統，由於投影與取像端的光纖與CCD皆可視為虛擬針孔，達到仿共焦(Confocal)系統裝置。 本系統也利用雷射干涉儀作為校正源，對本系統做精度驗證，針對4.21μm的標準階高片做校正下，最大全區量測誤差為0.106μm，平均量測誤差約為0.048μm，在±3σ的量測誤差範圍約為±0.113μm，最後利用機構設計理論，將所有元件模組化，形成一雛型機。模組化後利用4.21μm標準階高片做校驗，平均量測誤差約為0.104μm，最大全區量測誤差為0.166μm，在±3σ的量測誤差範圍約為±0.142μm。
並列摘要
Measuring technology is a key point for dimension verified in industry. With improvement of fabrication precision and micronization, micro-measuring technology becomes more important nowadays. As well as non-contact measurement technology is more flexible compared with contact measurement technology. It’s a trend for developing micro optical measurement technology. The research was based on “shape from focus” theory adopted fringe projection method via image fiber to increase measurement accuracy and used auto-focus function , noise elimination to reconstruct 3D-profile. Because utilizing image fiber and CCD can be viewed as virtual pinholes, our developed apparatus can be regarded as a confocal system. Experiments showed this is a useful system to measure 3D-profile of micro- to sub-micro-scaled parts. Maximum measurement deviation repetition of full-field measurement and average measured deviation was about 0.106μm and 0.048μm respectively with sample of gage block of height 4.21μm. Finally, the prototype apparatus was built up by using mechanism design. After modeling the system, maximum measurement deviation repetition of full-field measurement and average measured deviation was about 0.166μm and 0.104μm respectively with sample of gage block of height 4.21μm.