以DLP發展微三維量測系統之研究

Research of DLP-Based Micro Three-Dimension Measurement System

宋欣明(Hsin-Ming Sung)

指導教授 ： 范光照

國立臺灣大學/工學院/機械工程學研究所/碩士(2004年)

https://doi.org/10.6342/NTU.2004.01102

摘要

隨著電子產業的微小化，光學量測技術紛紛朝向微小尺寸表面量測發展。本研究之目的在開發研究微機械元件三維輪廓尺寸量測系統－立體顯微術（Stereo Microscopy），在現有基礎上提出了一種微三維逆向工程測試理論及系統設計方法。

系統主要架構以數位條紋投影技術(Digital Fringe Projection, DFP)搭配相位移量測原理(Phase-Shifting Principle)，發展三維光學量測系統。在理論上以多條紋投射法(面結構光)可節省單條紋掃描所耗費的時間，並以相位移法提高條紋量測精度；在技術上將整合數位微鏡晶片(Digital Micro-mirror Device, DMD)提供物體三維量測的結構光源，由程式來控制輸出所需的條紋週期和條紋數，可提高系統量測的彈性。

本論文使用投射範圍為5mm×3.75mm的面結構光來進行物體外型輪廓的重建及微工件尺寸的量測，此時系統的準確度(Accuracy)為5.4μm，標準差σ為3.18μm，可對於mm ~μm級的工件進行三維輪廓的重建，並可對於白光干涉儀所無法量測的傾斜表面進行量測。

關鍵字

立體顯微術；數位條紋投影技術；相位移量測原理；數位微鏡晶片

並列摘要

As the minimization of electric components spreads out, optical measurement techniques are developed toward micro-scale profile measurement. This research is proposed to construct a prototype of precision 3D measurement system, Stereo Microscopy, for the purpose of profile and dimension of micro components. It provides the concept and system design of micro 3D reverse engineering.

The main techniques of the system include digital fringe projection technology (DFP) and phase-shifting principle. Due to line scanning is replaced by fringe pattern (Area Structured Lighting), efficiency will be improved. The precision of measurement will be arised by phase-shifting principle. Besides, we can control the period and number of fringes to improve the flexibility of system by integrating digital micro-mirror device (DMD) into the system

In this research, the fringe pattern, which is 5mm×3.75mm in dimension, will be provided to reconstruct the 3D profile and the dimensional measurement of objects. The accuracy and standard deviation σ of the system is 5.4μm and 3.18μm. It can reconstruct the 3D profile of the components which are in the range of mm to μm. It can also easily measure some certain kind of samples that are difficult to be measured by white light interferometry.

並列關鍵字

Stereo Microscopy；digital fringe projection techn

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