以臨界角法做共焦顯微鏡之研究

Study on Confocal Microscope by Using Critical Angle Method

廖淑真(Shu-Jen Liao)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2005年)

摘要

本文提出一個以臨界角法結合共焦顯微鏡的基本原理，組成一個具有高解析度及長深度量測的光學量測系統，增進原有共焦顯微鏡性能，可應用於如光學表面、生物醫學、微奈米…等三度空間影像方面的量測。本方法具有結構簡單、成本低廉、高解析度及即時量測等優點，其共焦法的縱向解析度為2nm，量測範圍為0.8μm，而臨界角法之解析度約為3nm，量測範圍為12μm。

並列摘要

A new method for measuring a small displacement is presented. The principles of the measurement are based on the critical angle method and confocal microscopy. The longitudinal resolution of the confocal method is 2nm, and its measurement range is only 0.8μm. Moreover, the resolution of the critical angle method is about 3nm for NA and wavelength are 0.85 and 632.8nm, respectively, but its measurement range can reach 12μm. This optical structure could be applied to optical surface testing, bio-medical science, and nanotechnology in the future. The new technique has some merits, such as a simple and compact optical setup, high sensitivity, and high resolution.

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