Development of a Versatile Nanomanipulation System and Some of Its Typical Applications

一種多功能奈米機械操控系統的研製和其應用

章明(Ming Chang) ； 林家弘(Chia-Hung Lin) ； 茱蒂(Juti R Deka) ； 林宗珀(Chung-Po Lin)

《中國機械工程學刊》 32卷1期 (2011/02) Pp. 79-85

https://doi.org/10.29979/JCSME.201102.0009

摘要

於有限的空間環境中進行奈米尺度的操作或量測，需要藉由具有奈米定位精度與適當施力裝置的小型奈米操控系統完成。本研究設計與開發出一台可在掃描電子顯微鏡內部執行奈米加工與奈米材料機電特性量測的多自由度奈米機械操控系統，此操作系統是由數個獨立的操作單元組合而成，每個獨立單元都具備一個旋轉自由度和三個線性平移自由度，每個線性移動平台總行程為±5mm，每步可以達到30奈米的位移，旋轉軸則具360度自由旋轉的功能。每個獨立單元的端點均配備AFM/STM探針，可以在各種材質基板上進行奈米加工、奈米材料操控和機電性質的測量。

並列摘要

Nanomanipulation in space-limited environments requires small-sized nanomanipulators that are capable of producing nanometer positioning resolutions and large output forces. This investigation reports on the development of a multifunctional nanomanipulation system for nanomachining, nanofabrication and mechanical/electrical characterization of nanoscale objects inside a scanning electron microscope (SEM). The manipulator is made up of commercially available actuators and positioning stages. Several individual operating units have been combined to develop the manipulation system where each unit has three linear stages and one rotational stage. Coarse positioning along three linear axes and a 360° rotational motion of the probe of each unit are provided by linear and rotational picomotors. The positioning system of each unit can be equipped with AFM/STM tips as end effectors for both manipulation and measurement, such as nanomachining on different substrates and nanomechanical characterization.

並列關鍵字

nanomanipulator ； scanning electron microscope ； nanomachining ； mechanical characterization