Deformation in Thin Metal Films Irradiated by Femtosecond Laser

飛秒雷射照射的薄金屬膜內之變形

何慶炎(Ching-Yen Ho) ； 蔡裕祥(Mao-Yu Wen) ； 溫茂育(Yu-Hsiang Tsai)

《中國機械工程學刊》 32卷1期 (2011/02) Pp. 87-92

https://doi.org/10.29979/JCSME.201102.0010

摘要

本文利用拋物線兩步驟熱模式和熱彈性動力理論研究飛秒雷射照射的薄金屬膜內之變形。在飛秒雷射對薄金屬膜的加工，因為於非平衡階段，金屬晶格幾乎未受擾動，所以作用於金屬晶格的熱電子爆炸發生。爆炸力是如此的強烈以致於造成冷晶格的傷害。這研究直接將熱電子爆炸的熱場驅動力加於描述金屬晶格動力反應的熱彈性動力方程式。分析的結果顯示飛秒雷射照射的薄金屬膜之變形量隨増加的電子熱傳導系數、光的滲透深度及薄膜厚度而減少。

並列摘要

This paper utilizes the parabolic two-step model and dynamical theory of thermoeslasticity to investigate the deformation in thin metal films irradiated by femtosecond laser. In the femtosecond-laser processing of thin metal films, the hot electrons blast exerting on the metal lattices occurs because the metal lattices stay and almost thermally undisturbed at the stage of nonequilibrium energy transfer. The blasting force could be so strong that the cold lattices are impelled into the domain for damage. This study directly adds the driving force derived from the thermal field of hot electrons blast into the equation of dynamical theory of thermoelasticity that describes the dynamic response of the metal lattices. The results from this analysis show that the deformation of thin metal films decreases with the increasing electron thermal conductivity, optical penetration depth and film thickness.

並列關鍵字

deformation pattern ； thin metal films ； femtosecond laser