- 期刊
Fabrication Method and Experiment Study of Nanoscale Trapezoidal Groove on Sapphire Substrate by Using Atomic Force Microscope under a Fixed Cutting Depth and Changed Down Force
應用原子力顯微鏡之固定加工深度及改變下壓力加工藍寶石基板梯形溝槽之方法和實驗研究
摘要
本文應用原子力顯微鏡（Atomic Force Microscopy, AFM）加工藍寶石基板之奈米級梯形凹槽。本文創新提出以比下壓能及改變下壓力之觀念建立加工具固定深度之藍寶石基板奈米級梯形凹槽圖形之加工方法。在提出本文此加工方法前，本文先以實驗驗證比下壓能為一定值，其為以不同道次及不同下壓力下加工直線V型溝槽實驗，並驗證藍寶石基板之比下壓能值約為定值，且獲得藍寶石基板的比下壓能。應用本文所發展的加工之奈米級梯形凹槽方法，其加工後之梯形凹槽會有固定深度且其底部會有較近似平面的結果。本文並實際以固定切削深度及改變下壓力的加工方法進行奈米級切削梯型凹槽實驗。而由實驗結果可看出，此固定切削深度及改變下壓力之加工方法之實驗數值與模擬結果差異量相當接近。故本文所提出之固定切削深度及改變下壓力之模擬加工方法為可行的。
關鍵字
無資料並列摘要
This paper fabricates nanoscale trapezoidal groove on sapphire substrate by atomic force microscopy (AFM). Meanwhile, this paper innovatively proposes using the concept of specific down force energy (SDFE) and changed down force to establish a method for cutting nanoscale trapezoidal groove shape on sapphire substrate under a fixed cutting depth by using AFM. Before proposing this way of cutting, this paper firstly conducts experiments of cutting straight-line V-shaped groove for different passes and under different down forces to prove that SDFE is around a fixed value and obtain the value of SDFE of sapphire substrate. When the fabrication method of nanoscale trapezoidal groove developed by this paper is applied, the fabricated trapezoidal groove would have a fixed depth, and its bottom would only have a small protruding height which is similar to a flat surface with a small surface roughness. This paper also conducts the experiment fabricating the nanoscale trapezoidal groove on sapphire substrate by using AFM under fixed cutting depth and changed down force and compares the experimental results with the simulation results by using the proposed fabrication method. The compared results verify that the proposed fabrication method is feasible.
延伸閱讀
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