Dynamics of Morphological Formation Affected by Processing Parameters in Chemical Bath Deposition

化學浴沉積之製程參數對表面形貌形成影響研究

李昆達(Kun-Dar Li) ； 洪聖傑(Sheng-Jie Hong) ； 胡漢霖(Han-Lin Hu) ； 林大偉(David Ta-Wei Lin)

《中國機械工程學刊》 43卷3期 (2022/06) Pp. 239-249

摘要

Attracting by the simple processes with wide applications, even for a long time of development the chemical bath deposition method is still one of the most popular techniques utilized in many modern and advanced manufacturing fields. In this study, a numerical model is applied to explore the formation mechanisms of a chemical bath deposition and rebuilt the structural evolution of precipitation films during this process. Regarding to the feasibility of this model, various experimental parameters affecting the structural morphologies are taken into consideration to theoretically reveal their influences in the chemical bath deposition process. One of the major contributions in this study is on the characterization of the anisotropic growth with a three-dimensional anisotropic model in a chemical bath deposition, which is unique to the related studies. The factors, including the deposition rate, the preferred growth orientation and diffusion rate are systematically inspected to form miscellaneous surface profiles. From the numerical results, it shows that the pyramid-like surface morphology could be transferred into a four-fold symmetry mountain-like surface morphology by the preferred growth orientation. These numerical simulations visualize the processes of the nucleation and growth of precipitations during a chemical bath deposition. The theoretical model provides a favorable tool for the technological developments of chemical bath deposition.

關鍵字

Crystallographic effect ； Chemical bath deposition ； Modeling ； Phase field

並列摘要

化學浴沉積由於製程簡單與應用廣泛等特性，在許多現代化和先進製造領域中，扮演著重要的角色。在本研究中，採用了數值模擬方法來探討化學浴沉積之薄膜形成機制，重建薄膜沉積之表面形貌演化過程。在理論模型中，考慮了影響表面形貌的各種製程參數，透過數值計算模擬這些參數在化學浴沉積過程中對表面形貌形成與反應機制的影響。本研究的主要貢獻在於建立化學浴沉積製程之三維異向性數值模型，同時包含晶體異向性擴散與異向性成長。有系統地研究沉積速率、優選生長方向和擴散速率等製程因素，模擬出各種薄膜表面形貌的形成與演化。數值結果顯示薄膜金字塔形的表面形貌，透過優選生長方向的控制，可轉變為四重對稱的山脊狀表面形態。這些數值模擬展現了化學浴製程中薄膜沉積的成核和生長過程。本理論模型為化學浴沉積技術的發展提供了一有利的研究工具。