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鎳膜厚度對奈米碳管的結構與場發射特性之影響

The Effect of Nickel Thickness on the Structure and Field-emission Properties of Carbon Nanotubes

摘要


本研究以大面積成長方式,利用微波加熱化學氣相沉積成長法成長奈米碳管,可在相同成長條件下,得到不同催化劑厚度對成長奈米碳管的影響。當鎳膜厚度在5μm到100μm時,奈米碳管的直徑、長度和場發射特性都和催化劑層厚度息息相關,為一正比關係。當鎳膜厚度在100μm時,所成長的奈米碳管具有最佳的顯微結構,其直徑為88 nm大小,長度大於3μm,因此其長寬比高於34,使得起始電場相當低(~0.11 V/μm),且電場在5 V/μm時,電流密度有2.26 mA/cm平方的表現。

並列摘要


In this study, we investigated the effect of nickel thickness on the structure and field-emission properties of carbon nanotubes (CNTs) films grown by microwave heating chemical vapor deposition. We found that the diameter, length, and field emission of CNTs films are strongly related to the nickel thickness in the range of 5-100 nm; i.e. these properties increase with the increasing nickel thickness. Specifically, the CNTs film grown on 100-nm-thick Ni exhibits the best microstructure and filed emission: a high aspect ratio of >34, a low turn-on field (~0.11V/μm), and a current density of 2.26 mA/cm2 when the electric filed is 5 V/μm.

被引用紀錄


Wen, K. C. (2011). 電子束微影奈米結構製作:場發射陣列與奈米線圖形 [master's thesis, National Taiwan University]. Airiti Library. https://doi.org/10.6342/NTU.2011.03280
林修任(2007)。含稀土銲錫合金接點之界面反應、電遷移與錫鬚成長研究〔博士論文,國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2007.01320
Tsai, M. H. (2008). 高熵合金與其氮化物薄膜作為銅製程擴散阻障層之研究 [doctoral dissertation, National Tsing Hua University]. Airiti Library. https://www.airitilibrary.com/Article/Detail?DocID=U0016-1410200814310110

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