利用熱燈絲化學氣相沈積法研究奈米碳管之成長

Growth of Carbon Nanotubes Via Hot-Filament CVD

施政宏(T. H. Shi) ； 鄭凱文(K. W. Cheng) ； 馬遠榮(J. Z. Ma) ； 翁明壽(M. S. Wong)

《材料科學與工程》 36卷2期 (2004/06) Pp. 134-137

https://doi.org/10.6409/JMSE.200406.0134

摘要

本研究使用熱燈絲化學氣相沈積法成長奈米碳管，在氫氣、甲烷氣氛下以熱燈絲分解氣體並經由鐵族金屬催化劑催化成長，形成多層奈米碳管(CNT)。本研究探討催化劑種類、熱燈絲溫度及成長時間對奈米碳管成長的影響。結果發現，不同的催化劑種類有不同的奈米碳管的最低製程溫度；成長多層奈米碳管之管徑約為100nm；熱燈絲溫度的提升會造成奈米碳管的形態彎曲且管徑變粗；以鐵催化成長的奈米碳管隨著時間而變長，但長至約4m後即達到飽和不再繼續成長。

關鍵字

奈米碳管、奈米材料、熱燈絲化學氣相沈積法

並列摘要

Multi-wall carbon nanotubes (CNT) were grown in a hot-filament chemical vapor deposition system using a mixture of methane and hydrogen with the aid of catalysts of ferrous metals. The effects of catalyst, temperature of hot-filament and deposition time on the growth of carbon nanotubes were studied. The minimum temperature of tungsten filament for CNT growth is related to the carbon solubility of the catalyst metal. The diameter of the CNTs is about 100nm. Increasing temperature of hot-filament will result in an increase of diameter and bending of CNTs. The length of CNTs grown using Fe catalyst increases with deposition time but saturates around 4μm.

並列關鍵字

carbon nanotube, nanomaterials, hot-filament CVD