以氧化鋅中介層增進氧化鋁薄膜的結晶性及光學性質

Improved Crystallinity and Optical Properties of AlOx Thin Films by a ZnO Iinterlayer

林素霞(S. S. Lin) ； 黃肇瑞(J. L. Huang)

《材料科學與工程》 36卷2期 (2004/06) Pp. 71-78

https://doi.org/10.6409/JMSE.200406.0071

摘要

本研究中，為了評估基材對氧化鋁(AlOx)薄膜性質的影響，將AlOx薄膜沈積於玻璃基材及已披覆ZnO薄膜的玻璃基材(ZnO-deposited glass)上來作比較。直接沈積於玻璃基材的AlOx薄膜呈非晶質結構 (amorphous)，然而，於AlOx薄膜沈積之前，先披覆ZnO薄膜充當為中介層，使得AlOx薄膜呈多晶結構。由電子顯微鏡的觀察發現，沈積於ZnO玻璃的AlOx薄膜以非晶質及多晶結構共存，而且由TEM的實驗結果得知，AlOx薄膜的(122)平面平行於基材的表面，晶粒大小為38-54nm，且呈不規則形狀。此外，以不同實驗參數所沈積的ZnO中介層對於AlOx及ZnO之間的擴散界面深具影響性。
ZnO中介層可以增進AlOx薄膜的可見光穿透率，尤其是以射頻功率200W所沈積的ZnO薄膜，因此，ZnO玻璃是產生高品質AlOx薄膜的一種可選擇的基材，而被沈積在ZnO玻璃的AlOx薄膜具有相當好的結晶性及光學性質。

關鍵字

AlOx薄膜、ZnO中介層、多晶、光穿透率

並列摘要

To ascertain how the substrate influences the quality of AlOx films, AlOx films were grown on a bare glass and a ZnO-deposited glass in this study. By applying a ZnO interlayer before the AlOx deposition, AlOx films exhibited polycrystalline structure rather than amorphous as obtained by sputtering on a bare glass. For AlOx film on the ZnO-deposited glass, the transmission electron microscopy observation showed the coexistence of amorphous and polycrystalline structure, which reveals that the (122) plane in AlOx film is parallel to the surface of the substrate. The grains of the AlOx film grown on a ZnO-deposited glass comprising of many small crystallites aggregated with sizes varying between 38 and 54nm with irregular grain shapes. Besides, the ZnO interlayer with different deposition parameters had significant effect in the diffusion interface between AlOx and ZnO.
The ZnO interlayer could improve the optical transmission of AlOx films, especially when ZnO films are prepared with a high power of 200W. Therefore, the glass/ZnO may be a good alternative substrate for producing high-quality AlOx films by controlling the epitaxial grain growth. The AlOx films grown on ZnO-deposited glasses have very good qualities in terms of crystallinity and optical properties.

並列關鍵字

AlOx film, ZnO interlayer, polycrystalline, optical transmission.