局部電化學沈積法之一微結構製程及機械性質量測

Localized Electrochemical Deposition Process and Mechanical Property Measurements for One-Dimensional Structure

楊仁泓(J. H. Yang) ； 黃英修(Y. H. Huang) ； 李春穎(C. Y. Lee) ； 林招松(C. S. Lin)

《材料科學與工程》 37卷2期 (2005/06) Pp. 93-99

https://doi.org/10.6409/JMSE.200506.0093

摘要

在微製程下所製作出之微結構，其微結構的機械特性很容易受到製程的影響，而且與大尺寸結構物會具有不同的機械特性。本研究是利用局部電化學沈積法製作微米尺寸之銅金屬懸臂樑結構物，並探討在不同製程條件下，結構物沈積之行為。並量測微柱之動態共振頻率，探討沈積微柱之楊氏係數。最後藉由SEM表面形貌與軸向截面OM觀察，探討沈積微柱之相關缺陷對微柱機械性質之影響。

關鍵字

局部電化學沈積 ； 懸臂樑 ； 楊氏係數 ； 動態共振頻率

並列摘要

In general, electrochemical deposition has been employed to deposit metal on the metallic surface (plating) or to deposit metal for duplicating the patterns prepared by photolithographic process (electroforming). However, if by locally controlling the induced electric field to deposit metal, the lithography process for prepare the pattern by marks can be spared. Thus, it can reduce fabrication cost and error of masks or molds. Furthermore, using a localized electrochemical deposition can deposit micro-sized structures with high aspect ratio easily. Usually, the structure which is fabricated by micro-process, demonstrates mechanical properties different from its bulk materials counterpart. In this study, we use a localized electrochemical deposition to fabricate a cantilever beam of Cu which is in the dimensions of micrometers. The effects ov various control parameters of the deposition process are also studied. The first resonance frequency of the deposited structure is measured by the forced vibration at its base. The Young's modulus of the micro-structure is then inferred from the resonance frequency and several possible factors which affect the apparent stiffness are discussed. Because a stepping mode is used to deposit micro-structure in the experiment, a nodular micro- structure has been obtained. Therefore, this study also design a magnification mechanism which is composed of linkages connected by flexure hinges and is driven by a piezoelectric actuator. The continuous movement instead of stepped movement of the electrode with feedback control, should overcome the shortcoming of the previous study.

並列關鍵字

Localized electrochemical deposition ； Cantilever ； Young's modulus ； Piezoelectric actuator ； Flexure hinges