沸石複合薄膜材料之研究

Zeolite Nanocomposite Thin Films and Their Properties

林炯芳(C. F. Lin) ； 陳英豪(Y. H. Chen) ； 吳章榮(J. R. Wu)

《鑛冶：中國鑛冶工程學會會刊》 58卷4期 (2014/12) Pp. 85-92

https://doi.org/10.30069/MM.201412_58(4).0008

摘要

本論提出一種製備奈米沸石複合薄膜的製程，並製備二種複合材料；一者為由MCM-41顆粒與upper liquid of Faujasitesuspension（ULFS）之無機－無機複合薄膜，另一者為Silicalite-1與Polymer之無機－有機複合材料。經由本實驗室自行設計的氣霧沉積系統來製備複合薄膜。透過調整製程參數可獲得品質最佳的複合薄膜，再藉由XRD、FTIR、BET、SEM、TEM、接觸角等儀器分析薄膜性質。結果顯示本論文成功以氣霧沉積系統製備複合薄膜，相較於旋轉塗佈法在薄膜製備完成後需經長時間高溫煅燒才能移除模板，本系統能在短時間內沉積薄膜同時去除模板，具有簡化製程與避免在煅燒時使薄膜產生裂縫的優點。MCM-41與Silicalite-1具有遠比非結晶二氧化矽高的比表面積及機械強度，但其親水性及附著力限制其應用，許多研究為了將其做為低介電常數（low-k）材料，需藉由許多繁複的改質方法。本論文以本系統製備複合薄膜，製程簡單且不但可以改善其親水性及熱穩定性又可以附著力，使其應用更廣更具商業化價值。

關鍵字

奈米沸石複合薄膜 ； 氣霧沉積系統 ； low-k材料

並列摘要

In this study, we used a liquid spray system to fabricate zeolite nanocomposite thin films from MCM-41 and upper liquid of Faujasite suspensions. We investigated the effects of the operating parameters such as the heating temperature on substrate, the rates of the main air, the auxiliary air flow and deposition time and optimized to produce good quality zeolite nanocomposite f ilms. The crystallinity, surface morphology, and chemical composition of the zeolite nanocomposite thin films were investigated using XRD, FT-IR, BET, TGA, SEM, TEM and Constant Angle Meter. Results showed that the zeolite composite thin films deposited from the liquid spray system is better than that from spin-coating method in many respects. The liquid spray system required less time to remove the template agents under high-temperature calcinations. The liquid spray system also simplified the manufacturing process and avoided cracking of the thin f ilms during the high-temperature calcinations. The fabricated zeolite thin f ilms had higher adhesion and hydrophobicity than that manufactured from colloids such as macromolecules.

並列關鍵字

MCM-41 ； zeolite composite thin films ； liquid spray system ； low-k materials