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The Outgassing and Pumping Effect of an Ultrahigh Vacuum System
並列摘要
An ultimate pressure of 4 x 10”^2 Torr was reached in a locally made SUS304 stainless steel vacuum chamber. Ion pump, titanium sublimation pump and non-evaporable getter pump were used in the system. The pumping and outgassing effects of the pumps were studied. The pumping effect of gauages and a Ti-ball during preheating procedures were observed. Outgassing during bakeout and after pumps off were also studied in this work.
並列關鍵字
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延伸閱讀
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