Influence of Processing Parameters on Electron Field Emission Characteristics of Diamond-like Carbon Films Synthesized by Pulsed Laser Deposition

Hsiu-Fung Cheng ； Tzay-Shing Lai ； Cherng-Yuan Sun ； I-Nan Lin

《Chinese Journal of Physics》 37卷4期 (1999/08) Pp. 421-431

並列摘要

Diamond-like carbon (DLC) films synthesized by the pulsed laser deposition process produce a large electron field emission capacity at low applied field, showing great potential for applications as electron emitters. The substrate temperature used for preparing the diamond-like carbon (DLC) films by the pulsed laser deposition process pronouncedly modifies the sp3-bonds content and the morphology of the DLC films. A large portion of sp3-bonds results in a high emission current density (Je), whereas spherical cluster geometry results in low turn-on field (E0). By contrast, gold precoatings reduce the resistance for the electron to transport from the substrate to the DLC clusters without modifying the nature of the DLC clusters. The incorporation of boron into the DLC clusters further improves their electron field emission properties due to appearance of the impurity levels. Moreover, the post-annealing and the plasma (Ar, N2 or O2) post-treatment processes alter the morphology and the proportion of sp3-bonds for the DLC films, resulting in a marked improvement in their electron field emission behavior.