Effect of Substrate Temperature on the Characterization ofMolybdenum Contacts Deposited by DC Magnetron Sputterings

Y. C. Lin ； W. T. Yen ； L. Q. Wang

《Chinese Journal of Physics》 50卷1期 (2012/02) Pp. 82-88

並列摘要

This study involved depositing back contacts of molybdenum (Mo) thin film for Cu (In,Ga)Se2 (CIGS) solar cells on soda-lime glass substrates via DC magnetron sputtering, investigating the microstructural, mechanical, and optoelectronic properties of the deposited Mo films as a function of the substrate temperature T(subscript sub). The experimental results show that the interface adhesion strength between the glass substrate and the Mo film increases in conjunction with T(subscript sub). The best adhesion strength was obtained at over 25MPa, and the root mean square of the surface roughness has the lowest value of 1.0 nm. The Mo contacts deposited at T(subscript sub) over 200◦C had an average optical reflectivity as high as 57.4% within the wavelength range from 400 nm to 1200nm. When T(subscript sub) equals 250◦C under a working pressure of 0.39Pa, the Mo film has the lowest resistivity of 1:1 × 10^−5 Ωcm.