A Real-Time Scheduling and Rescheduling System Based on RFID for Semiconductor Foundry Fabs

以RFID爲基的晶圓廠即時排程系統之發展

蔡蕎如(Chiao-Ju Tsai) ； 黃漢邦(Han-Pang Huang)

《工業工程學刊》 24卷6期 (2007/11) Pp. 437-445

https://doi.org/10.29977/JCIIE.200711.0001

摘要

本論文以RFID (Radio Frequency Identification)技術爲基礎，提出一個排程和重排程系統。此系統有三個主要的模組，分別爲即時決策排程器(real-time decision-making scheduler)、考慮機台損壞和瓶頸機台的重新排程法則、及系統模擬平台(Simulation Platform)。所提出之排程及重排程法則已成功應用在SEMATECH 及TRC 300 mm晶圓廠。根據模擬結果，在SEMATECH 晶圓廠績效指標的表現上，分別讓平均流程時 間(Mean Flow Time)減少3%（203.32→197.307 小時），延遲批量降低17%(63→52 lots)。在TRC晶圓廠績效指標的表現上，分別讓平均流程時間減少4%（451.23→427.86 小時），延遲批量降低25%(15→12lots)。平均產出量(Throughput)也以所提出之一整組的派工法則比單一個派工法則表現要好。此外，所提出的架構及方法亦能處理機器故障及瓶頸機台問題，重排程後均有良好的績效表現。

關鍵字

無線射頻識別系統 ； 排程 ； 重新排程 ； 支向機

並列摘要

This paper constructs a real-time scheduling and rescheduling system based on RFID (Radio Frequency Identification) information for fully automated fabs. The system consists of three modules: a real-time decision-making scheduler, a rescheduling mechanism for machine breakdowns and bottleneck, and a simulation platform. The proposed scheduling and rescheduling system have been successfully applied to the 300mm foundry fab of SEMATECH (SEmiconductor MAnufacturing TECHnology) and TRC fab (Hewlett-Packard Technology Research Center Silicon fab). From simulation results, the dispatching rule sets proposed by SVM scheduler have better performance than a single dispatching rule. In SEMATECH model, the mean flow time is reduced 3%(203.32→197.307 hours), tardy numbers are decreased 17% (63→52 lots), and throughput is increased (176852→177951 wafers). In TRC fab model, the mean flow time is reduced 4% (451.23→427.86 hours) and tardy numbers are decreased 25% (15→12 lots). Clearly, the results are much better than previous researches. In addition, the proposed framework can deal with the machine breakdowns and bottleneck so that the system performance can be improved in time.

並列關鍵字

scheduling ； rescheduling ； radio frequency identification RFID ； support vector machine SVM

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