氧化銦錫（ITO）透明導電膜在有機電激發光顯示器的應用發展

The Development of Indium Tin Oxide Transparent Conducting Film for Organic Light-Emitting Diode Applications

許進明(Ching-Ming Hsu) ； 陳建興(Tan-Shin Chean) ； 李晉文(Jin-Win Lee) ； 呂竟楓(Ching-Feng Lu)

《真空科技》 17卷1期 (2004/07) Pp. 49-56

https://doi.org/10.29808/JVSROC.200407.0008

摘要

目前的顯示器是藉自發或外鄉光源以產生靜態資訊或動態影像的畫面，因此同時具有優良的光穿透性與低電阻值的顯示電極材料是平面顯示器不可或缺的一個單元，氧化銦錫（Indium Tin Oxide, ITO）透明導電膜是平面顯示器發展以來被使用最廣泛的一種電極材料，因為它具有穩定的光學與電特性，ITO透明導電膜在1954年被發現並於1975年開始被應用於顯示器後，至今已是一項相當成熟的技術，然而應用於一般如液晶顯示器或電漿顯示器的ITO透明導電膜，並不完全適用於近來最被期待具有發展遠景的有機電致發光二極體（Organic Light-Emitting Diode, OLED）顯示器上，因為要達到高發光效率與長壽命的OLED發光元件特性要求，ITO透明導電膜除了基本的優良光學與電特性之外，也必須具有平整的微觀表面與高的表面功函數，本文即針對ITO透明導電膜在有機電致發光二極體的應用作一有系統的探討，期待對於OLED的特性改善能有更進一步幫助。

並列摘要

An display electrode with high optical transmittance and low electric resistivity is required for display applications. Indium Tin Oxide (ITO) has been widely used as an electrode material in flat panel displays due to its stable properties in optics and electrics. ITO was discovered in 1954 and used for display applications in 1975. The fabrication of ITO films is now a mature technique for displays such as liquid crystal display (LCD) and plasma display panel (PDP). However the properties of the traditional ITO are not suitable for organic light emitting diode (OLED) applications. This is because superior ITO surface roughness and high surface work function are required to achieve high luminence efficiency and long life-time OLED devices. This article presents the recent development of ITO film processing for OLED applications.